Light Emitting Diode(LED)

1
?????? part I
???? ?????????????
2
??????????
Light Emitting Diode(LED) Laser Diode(LD) Photo
Diode(PD) Solar Cell Metal-Semiconductor
Field Effect Transistor(MESFET) Hetero Bipolar
Transistor(HBT) High Mobility Electron
Transistor(HEMT)
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???????(????)????
Si, Ge, (C) ???????? GaAs, InP, InAs, InSb,
?????? GaN ?????? CuInSe2 ??????????
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????
zinc blende
diamond
wurtzite
chalcopyrite
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??????(?1?)?????

• ???????????
• ???????????
• ????????????
• ????
• ?????(??????????????)
• ???
• ???????????(Ewald?)
• X?????????
• ?????
• ?????????
• ????
• ??????????????
• ?????????

6
?????????

• ???????
• ??????
• GaAs 8,800 cm2/Vs Si 1,350 cm2/Vs
• ???????????
• ???????
• ?????
• ???????????????????
• ????????
• AlGaAs, AlGaInP, InGaAsP, InGaN,

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????????????????
?????
Si GaAs AlGaInP InGaAsP GaInN

???????IC?CPU?????? ???????????? ?????????(CD,DVD,
????) ??????????(1.55µm) ????????????????
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?????????????
??????(LD?LED?)
??????(PD??????)
???
???
?
?
?
?
Eg
Eg
?
hv
hv
?
?
????
????

1. ????????(??)
2. ???(??)
3. ??

1. ???
2. ????????(??)
3. ????

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???????????????
???
Eg ??????? c ?? h ??????
????
???? 1.41 eV (GaAs) 1.55µm (LD)
890 nm 0.8 eV
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?????
InGaAs ???? InxGa1-xAs (0?x?1) x In??

IIIxIII1-xV, IIIxIIIyIII1-x-yV,
IIIVyV1-y, IIIxIII1-VyV1-y, InGaAs,
AlGaInP, GaAsP, InGaAsP,
In????????????????????????????
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????
InxGa1-xAsyP1-y
??????????????????
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?????????????????????

• ???????????????????????????????
• 4???????????????????????????

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???????(LED)???????(LD)
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???????????
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?????????????
T. Mukai et al, Jpn. J. Appl. Phys., 38, p.3976
(1999)
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???
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??????????
?????????????????????????

• ??????? ?????????

• LED???

p?
p?
n?
n???
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??????(Laser Diode)
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?????????

• LD???

p??????
p?????
???
n?????
n???
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LED???LD???
LED
LD
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HEMT??????
???????????????? ?????????????????(?????)
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?????????????????????

• ???(????)?????
• nm????????
• ?????(???????)
• ppm????????
• ???????????
• ??
• ????????

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???????????????

• ?????????(LD,LED??)
• ?????????????
• ??????????
• ???????????????
• ?????????????(IC??)
• ?????????????????
• ????????
• ???????????(??????????)

24
??????
epitaxy epi taxy ???????? epi
taxiz ???? ??
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???????????????????

• ????
• Liquid Phase Epitaxy(LPE)
• ????
• Halide Vapor Phase Epitaxy(HVPE)
• OrganoMetalic Vaper Phase Epitaxy(OMVPE, MOVPE,
  MOCVD)
• Molecular Beam Epitaxy(MBE)

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Liquid Phase Epitaxy(LPE)
???? ??
1.???????????????????????????? 2.?????????????????
????????????? ??????????????????????? ???????(nm
??????????)
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Halide Vapor Phase Epitaxy(HVPE)
???? ??
H2??????????AsH3, PH3??? Ga?HCl???????? ???????
????(Cl, I ??)??????????????? ????????
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MOVPE?MBE

• ???????????????(1µm/h ? ML/s?ML???????)
• ???????????????
• ????????????????????

??????????????(????????)??? ???????? ??????
??????(HEMT) ??????(LD) ???????? GaInNAs,
InGaN
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MOVPE???????(?-?????)
?? TMGa( Ga(CH3)3 ), TMAl, TMIn, TEGa(
Ga(C2H5)3 ), TEIn, ?? AsH3, PH3, NH3,
TBAs( t-C4H9AsH2 ), TBP, DMHy,
????? DEZn SiH4, H2Se
?????????????????
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MOVPE??(????????)
H2???????????????
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MOVPE??(???)
??????
???????????????
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MOVPE???????(?-?????)
?????? ?????? ???? ?????
??? LC50
PH3 11-50
TBP gt1100
AsH3 5-50
TBAs 70
LC50 ????4??????????????
?????? ????????????????????????????????????????
???????????????????????????????
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MOVPE?????
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MOVPE???

• ??
• As??P??N???????????????????
• ???????????????
• ??(????????)???
• ????
• ??
• ???????
• ?????
• ?????????????

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MBE???
????????
2?????????MBE???
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K???????????
????????
k??(Knudsen cell)
??(PBN) 1200?
9001000? AsH3, PH3, As4 As2, P2 ??MO?????
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?????MBE???
?????MBE ???????(Ga, Al, In, As )
??? ????????(????)????????????? ????????????????
??????????
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MBE??????
?????MBE ??????? ???????
?????MBE ????????? ????????? ???? ????????
MOMBE ????????? ????????? ????? ???? ???? ????????
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????MBE??
MBE?? ???NH3??????????? ??????????
N2???????????????( N-N 9.8eV )
NH3?DMHy??????????N2???
InN(?????????????) In N?????? ???? 500?
NH3????? 1 ???????????????? RF????(13.56MHz)?EC
R????(2.45GHz, 875G)
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????
??????? N2?N ??????
??? N2?(N2)?N ????????????????????????????? ?
???????? ??????????????????????
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??????(??????)
391
???
428
?????
747
100W, 210-4Torr
822
ECR ????2nd positive RF ?????(N)?1st
positive
W.C. Houghes et al., J. Vac. Sci. Technol.,
B13(1995)1571.
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?????????
43
???

• ???????
• LED, LD, HEMT
• ??????????????
• ?????????????????????
• ????????????
• ?????????????
• ??????????
• LPE, HVPE, MOVPE, MBE