??????????? ?????????? ?????? ? IGBT ????????? ?? ?? ?????????????? ? ??????????????? ??????????

1
??????????? ?????????? ?????? ? IGBT ?????????
?? ?? ?????????????? ? ??????????????? ??????????

• ?.?. ????????1, ?.?. ??????1, ?.?. ???????1, ?.?.
  ????????2
• 1 ??????????? ??????????????? ???????????
  ??????????? ? ????????????????, ?????, ?????,
  ?????????? ????????
• 2 ??? ????????, ?????, ?????????? ????????

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2
??????????

• ????????
• ???????????
• ??????????? ?????????? ??????
• IGBT ?????????
• ??????????
• ???????????
• ??????????
• ??????????

2/16
3
????????
????????????? ? ??????????? ???????????????
?????????? IGBT (Insulated Gate Bipolar
Transistor)
??????? ?????????? ??????? ?????????
3/16
4
???????????
Silvaco ??????????/??????????/?????/???????
4/16
5
??????????? ?????????? ??????
Wbr ?????????? ????? ???????? Wr ??????
?????? xj ??????? ????????? pn ????????
hepi ??????? ?????????????? ?????? tox
??????? ?????? L ????? ??????? ????????
????????? ? ????????? ???????? ? ??????? ?????????
5/16
6
IGBT ?????????
? ??????? ???????? ?????????, ??????????????
??? ???????????? ??????????? ?????????? ??????
? ??????? ? ????????? B ???? S
????? G ?????? D ????
6/16
7
??????????
Wbr (1) 5 µm (2)15 µm (3) 35 µm, and (4) 65 µm
??????????? ???? ?????????? Ic ?? ?????????? ??
?????????? Vc ??? ???????? ? ???????
???????????? ????? ???????? ??????? ?
pn????????? Wbr
7/16
8
??????????
Wr (1)15 µm (2) 20 µm, and (3) 30 µm
??????????? ???? ?????????? Ic ?? ?????????? ??
?????????? Vc ??? ???????? ? ??????? ??????????
?????? ????????? ?????? Wr
8/16
9
??????????
xj (1) 1.8 µm and (2)2.4 µm
??????????? ???? ?????????? Ic ?? ?????????? ??
?????????? Vc ??? ???????? ? ??????? ?????????
????????? pn???????? ????????? ?????? xj
9/16
10
??????????
L (1)20 µm (2)10 µm (3) 30 µm (4) 45 µm, and
(5) 5 µm
??????????? ???? ?????????? Ic ?? ?????????? ??
?????????? Vc ??? ???????? ? ??????? ???????
??????? ????????
10/16
11
??????????
1 ??????? ? ?????? 2 ????? 3 ??????
??????? ???????? 4 SiO2 5 ??????? ?
??????? ????????? ?????? 6 ?????? ????????
?????? 7 ????????.
????????? ? 4-?? ????????? ???????? ? 5-?
???????? ??????????
11/16
12
??????????
D 7.41013 cm-2 (1) 6.41013 cm-2 (2)
3.41013 cm-2 (3)
E 110 kV (1) 120 kV (2) 130 kV (3)
??????????? ???????????? ????????????? IGBT
????????? ?? ?????????? ????????????????
??????????? ??? ???????????? ??????
12/16
13
??????????? - ????? ???????????
?)
?)
?) IGBT ?? ??? ????????? ?) Trench IGBT.
13/16
14
??????????? - IGBT ?? ???
1 hox30 ?? 2 hox40 ?? 3 hox50 ?? 4
hox60 ?? 5 hox70 ??
??????????? ? ???????????? ?????????????? IGBT
?? ??? ????????? ??? ????????? ????????? ???????
????????????? ???????????
14/16
15
??????????

• - ?????????? ?????????? ?????? VBV 1150 ? IGBT
  ????????? ??????????? ???????????
  ???????????????????????????? ??????????
  (?????????? ????? ????????? ????????, ??????
  ??????, ??????? ????????? pn ????????, ?????
  ??????? ???????? ? ??????? ?????????????
  ???????????).
• - ??????????? ??????? ????????? ????????????
  ????????????? IGBT ?????????.
• - ???????? ??????????????? IGBT ??????? ?? ???
  ????????? ?? ????????? ?? ?????????? ?? ????????
  ???????
• ????? ????????? ? ?????????? (25 ? 55 ??) ??
  ??????? ????,
• ??? ?????????? ?? ??? ??????? ???? (175 ??? ?1,4
  ???).

15/16
16
??????????

1. Belous A., Lovshenko I., Nelayev V., Turtsevich
   A., Shelibak I. High breakdown voltage and
   switching speed IGBT design // Proc. of the Int.
   Euromicro Conferences - 38th on Software
   Engineering and Advanced Applications (SEAA) and
   10th Digital Systems Design (DSD), Turkey, Izmir,
   September 5-8, 2012.
2. Artamonov A., Nelayev V., Shelibak I. Technology
   design of IGBT // Proc. 11th Int. Conf. on The
   experience of Designing And Application of CAD
   Systems in Microelectronics CADSM), Lviv-Polyana,
   Ukraine, February 23-25, 2011. - P. 8-9.
3. Artamonov A., Nelayev V., Shelibak I. Technology
   and electrical design of IGBT // Proc. 18th Int.
   Conf. on Mixed Design on Integrated Circuits and
   Systems (MIXDES), Gliwice, Poland, 16-18 June
   2011. - P. 143.
4. Artamonov A., Nelayev V., Shelibak I., Turtsevich
   A. IGBT Technology Design and Device Optimization
   // Proc. 9th Int. Conf. on East-West Design and
   Testing (EWDTS), Sevastopol, Ukraine
   09-12September 2011,.- P. 117-121.

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