Weekly report

1
?????? Manufacturing Execution System MES
2
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

3
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(??)?????
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4
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

5
???????
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??????? (I)
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??????? (II)
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??????? (III)
??????
????BIC /
????KM
???
???
?????? CRM
?????? ERP
????? SCM
?????? PDM
?????? MES
??????/??????????/????????
EC Platform / WEB Application Server/ Application
Server
9
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

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What is IC industry
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IC Manufacturing Process (I)
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IC Manufacturing Process (II)
??
??
??
??
??(Thin_film) 1.??????(CVD) 2.????(PVD) 3.??(Diffu
sion)
Wafer
FILM Wafer
FILM Wafer
??(PHOTO) 1.??(MASK) 2.??(Coater) 3.??(Exposure) 4
.??(Development)
??
??
?? FILM Wafer
?? FILM Wafer
??(ETCH) 1.???(Wet-ETCH) 2.???(DRY-ETCH)
??
??
????(PR remove) ????????????? ??(PATTERN)
????
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IC Manufacturing Process (III)
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IC Manufacturing Process (IV)
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Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

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IC Manufacturing Process Management (1)

• ??4M (Man, Machine, Material and Method)
  ?????????????????????.
• Cost
• Cycle Time
• Yield
• Productivity

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IC Manufacturing Process Management (2)

• There are 30-50 basic routes for production FAB
• There are 500-1000 product routes in one FAB
• There are 3000 tools monitoring routes in one FAB
• There are 500-1000 production tools in one FAB
• There are 1K wafers start in one FAB
• There are daily 80K track-in-out in one FAB
• There are daily 15M transactions in one FAB
• There are average daily 600 people operation in
  one FAB
• There are daily 1-2K tool monitoring operation in
  one FAB
• There are average 10K control/dummy wafers in one
  FAB
• There are average 14K SPC charts used in one FAB
• There are 20K real-time tool monitoring charts in
  one FAB
• There are average 4000 tool alarms in one FAB
• There are average 2K final wafer test data files
  generated

18
IC Manufacturing Process Management (3)
Material
Tool
Human
Quality
Technology
Knowledge

• Why we need MES ?
• More technologies
• More tighten process control
• More cost for any production lost
• More demand for cycle time management
• More automation operation is required

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IC Manufacturing Process Management (4)
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Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

21
IC Manufacturing Process Management (4)
Quick Response to Business Change Cycle
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Semiconductor challenge in ITRS

• Complexity Management
• Rapid changes to business needs and demands.
• Increasing process and product complexity.
• Larger wafers and carriers.
• Increased reliance on factory information and
  control systems.
• Factory and Process Optimization
• Increased customer expectation to meet on time
  deliver.
• Increased urgency for improved factory
  effectiveness.
• High factory yield at start-up.
• Reduce wafer and product costs.
• Extendibility, Flexibility and Scalability
• Reuse of factory information and control systems.
• Factory systems that support rapid process and
  technology changes.

Source ITRS 2003
23
Improvement for Semiconductor challenge in ITRS

• Cost per unit area of siliconManufacturing cost
  per unit area of silicon is a easure of
  productivity. The capital cost of a factory has
  grown significantly each year, from 50M US in
  the 1980s to over 3B US in 2003.2
• Time to ramp a factory to high-volume production
  with high yieldsDecreasing time to ramp a
  factory to high volume production and high yield
  has more economic impact than reducing operating
  costs. New factories must be built and ramped to
  mature production at a much faster rate as
  reflected in Tables 86 and 89. Existing factories
  must be upgraded faster without impacting ongoing
  production.
• Increasing flexibility to accommodate technology
  and business changesTechnology advances and the
  globalization of manufacturing enterprises have
  led to a decrease in cost for electronic
  components. This enables new markets to open and
  creates the need to increase the pace of new
  product introduction. The flexibility to
  accommodate these changes in business
  expectations must improve without significant
  cost impacts.

24
KPI in ITRS Factory Operation
Source ITRS 2003
25
KPI in ITRS Production Equipment
Source ITRS 2003
26
KPI in ITRS FICS
Source ITRS 2003
27
KPI in ITRS Facility
Source ITRS 2003
28
KPI in ITRS Metrology
Source ITRS 2003
29
KPI in ITRS Process Integration
30
KPI in ITRS Yield Learning
Source ITRS 2003
31
KPI in ITRS Yield Enhancement
Source ITRS 2003
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Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

33
MES
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MES definition

• manufacturing execution system Software systems
  designed to integrate with enterprise systems to
  enhance the shop floor control functionality that
  is usually inadequate in ERP systems. MES
  provides for shop floor scheduling, production
  and labor reporting, integration with
  computerized manufacturing systems such as
  automatic data collection and computerized
  machinery.
• MES is a term used to describe systems that track
  and manage all aspects of a job in real time
  while it is in the execution phase or in process
  It may include resource management, capacity
  scheduling, maintenance management, statistical
  quality control, laboratory information
  management, process management, data collection,
  plant wide document management and process
  optimisation. MES is focused on the short term
  and may link to ERP/MRPII software for higher
  level planning and control tasks.
• Enables network managers to gather control data
  from the shop floor into coherent and relevant
  information. Key functions include data
  acquisition, dispatching, document control,
  scheduling, resource allocation, product history,
  operational analysis, and management of labor,
  maintenance, processes, and quality.
• ????????????????????????,????????????????
  ????????????????????????????????,????????
  ???????????,????????????????,??????,?????
  ????MES??????????,???????,???????,????????,
  ????????????,?????????????,????????????????

35
MES History
1960??????1970???? ??????????????(MRP),????????
??????????? 1970?????1980????
??????????????,MRP????MRPII,?MRPII??????????(Shop
Floor Reporting System)?????(Purchasing
System)?????????????,???????????????????????,?MRPI
I??????????????,????????????????????,?????????(Di
stributed Resource PlanningDRP)?MES(??WIP??)?????
???(?????)??????????,???????????,???????????????
1980?????1990??? ?????????????????????????????M
RPII????????(Enterprise Resource Planning,
ERP)?DRP????????,??????????????MES???1990????,????
?????????????,?ERP??????????? ????????MESA
International White Paper No. 5, 1997??
36
MES History
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(No Transcript)
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(No Transcript)
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MES Response
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Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

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MES core functions
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MES assist functions
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MES functions
??????
??? ??
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???(???)??
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MES ??
????? ????
??????
????
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MES ????
SPC
????
??????pc??
??????
44
How MES help
MES
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How MES help
Challenge if Without MES
With MESs Help

• Run Cards ??????
• ??????????
• ???????Run Card
• ??????
• ????????
• ????????, ??? SPC ??
• ???????,???????
• ????
• ????
• ????????? (???,??,?)
• ????????
• ????????
• ????????

• ????????, ?????????
• ???? (???) ??????
• ?????????????
• ?????? Miss Operation
• Recipe/Mask, Data Feedback/Forward
• ??????, ??, ?? SPC ??
• ??????, ??? Actions
• ????????
• ???????
• Real-time Fab-wide ??
• Real-time ????????
• ????????
• Information at your fingertip

46
Manufacturing Function Group in semiconductor(1)

• PART management
• BOM, Process management (tool, equipment)
• SPEC management (quality spec in each process,
  queue time)
• Technology Management
• Tool management
• Layout management
• Scheduling and Dispatching management
• Priority management (Link with SCM)
• Capacity Planning
• Dispatching agent
• Track-In-Out management
• Recipe management
• Tool ALM management
• Equipment management
• Process control management

47
Manufacturing Function Group in semiconductor(2)

• Automatic Tool Control
• Integrated Material, MES and Tool
• Automatic data collection (MFG data and ENG data)
  
• Tool control (track-in, process, track-out)
• Real-time tool monitoring
• Real-time process monitoring
• WIP tracking and decision support system
• Detail WIP tracking (WIP-Tool-Human-Time-Event)
• Tool Utilization (OEE)
• Super Hot Lot Management
• Hold Lot management
• Alarm management
• Data quality control
• Queue time management
• Rework Management
• SPC control
• OCAP
• Yield analysis

48
Manufacturing Function Group in semiconductor (3)

• Tool Management
• Tool ID, Capability
• Tool constraint
• Tool Layout (link with AMHS)
• AMHS management
• Human Management
• Security
• Certification
• Time management
• Material Management
• FOUP
• AMHS (MCS management)
• GAS/ Chemistry
• Integration
• SCM integration (scheduling)
• PDM integration (PART)
• Engineering Data Integration

49
MES benefit
Source TIBCO Software
50
MES benefit

• The potential gain by implementing MES addresses
  the need for immediate current, on-line
  information that allows users of the MES system
  to make the best informed decisions regarding the
  application of inventory, plant resources and
  people
• Reduces manufacturing cycle times
• Reduces WIP Inventory
• Reduces paperwork between shifts
• Eliminates lost paperwork/blueprints
• Improves customer services
• Reduces or eliminates data entry
• Reduces lead time
• Improves product quality
• Empowers plant operations people
• Responds to unanticipated events

51
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES ??
• MES ???e ??????

52
MES ??
53
MES ??
FACTORYworks
Factory Modeling
EDC/SPC
Report
WIP Management
Process Plan
EDA
EQP Management
Security Control
Monitoring
Message Bus
SEMI DevNT Clients
Area Applications
Intelligent User Interface
SECS I/F
IUI Web UI
Bus rules

• Semi-auto EDC
• Dispatch/What is next
• Lot Schedule/Based on C/T
• Reticle Usage forecast
• Reticle Management

• Recipe Management
• Event/Alarm Management
• Preventive Maintenance
• Carrier Management
• EEN/ECN

54
MES ??
MES Server
TCS(Cell Level)
AMHS Integrator
E5/E30/E37 E42/E58 E40/E90 E87/E90
E5/E37 E82
E5/E37 E88
TAP300 Process Equipment
E84
IntraBay Xfer Eqp
InterBay Xfer Eqp
E5 SECS-II, E30 GEM E37 HSMS Generic
Services E40 Standard for Processing
Management(PJM) E42 Recipe Management
Standard E58 ARMAS E87 Carrier Management E90
Substrate tracking E94 Control Job Management
E82 IBSEM E84 Parallel I/O Interface E88
Stocker SEM
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MES ??
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MES ??
MES
EES
HACMP Cluster 2
HACMP Cluster 1
Cluster
FIRSTDB
Ext I/F
RTMDB
SM/SCH Server
MM Server
Database Server (MMDB/SPCDB)
Shared Storage
Shared Storage
EMR LES/eSPC EES ODS
CIMDB (Hot-Standby)
CIMDB
CIM Framework
RPTDB Replication
CIM Framework
CIM Framework
Orbix
Orbix
Orbix
AIX / HACMP
HP 8400
AIX / HACMP
HP 8400
AIX / HACMP
AIX / HACMP
HP 8400
AMHS MCS Standby
i-EDA Server
Reporting DB Server
Dispatching Server (ISS report)
Dispatching Server (RTD)
AMHS MCS Server
Orbix
Orbix
AIX / HACMP
AIX / HACMP
Sun
Sun
AIX
AIX
DBS servers
DBS servers
DBS servers
GMP Loader
ALM server
ADODB server
OSS server
CFM server (f14cfm01)
CFM loader (f14sch01)
MDB server
PMS server
RMS server
ECS server
RTM server
MMS server
SDEV F/W
COMet
Orbix
NT or Win2000/PC
OMI
SCH Client
SM Client
ALM GUI
RTM GUI
ECS GUI
APC300 GUI
RMS GUI
PMS GUI
CFM300
Report Viewer
SPC Pro
OSS GUI
iEDA
MMS GUI
Orbix COMet
SDEV F/W
Orbix
SiView MainStarter
NT or Win2000/PC
57
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES operation
• MES ??
• MES ???e ??????

58
MES framework
Exposure
Develop
Coat
Dispatch
Display WI
TrackIn
SetUpEqp
TrackOut
TrackIn
SetUpEqp
Collectdata
TrackOut
TrackIn
CollectData
TrackOut
MonitorAlarms
(MBX)
Eqp Manager
Equipment Communications
..
59
How does MES function with operation
Track In Lot ListLot01 Lot02 Lot03 Input Lot
Id, EQ Id
Display Operations Temp 75 C Time 120
min Data Collection
Data Collection Input Data
Track Out Info. Next Step Next Location
Track Out Input Lot Id, Qty
Process Start
Lot01
Lot Load into EQ Setup Parameter
Lot Unloadfrom EQ
Setup EQ
Transfer Lot to Next Location
60
How does MES function with operation
Track In Lot ListLot01 Lot02 Lot03 Input Lot
Id, EQ Id
Display Operations Temp 75 C Time 120
min Data Collection
Data Collection Input Data
Track Out Info. Next Step Next Location
Track Out Input Lot Id, Qty
Process Start
Lot01
Lot Load into EQ Setup Parameter
Lot Unloadfrom EQ
Setup EQ
Transfer Lot to Next Location
61
How does MES function with operation
Staged Lots
In-Line Staging Area
WAIT State
P R O C E S S - S T E P 1
Equipment
EQP1
EQP2
Track-In
Track-Out
EQP3
EQP4
Scrap
EQP5
Next Process Step Staging Area
2
62
SiView DEMO - BR
63
SiView DEMO Tool status
64
SiView DEMO WIP tracking
65
SiView DEMO WIP tracking
66
SiView DEMO SPC
67
SiView DEMO Decision Support
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Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES operation
• MES ??
• MES ???e ??????

69
MES ??

• Message Bus (TIBCO, XML, SOAP, Rosetanet)
• Database (Oracle, SQL, DB2, Informix)
• Client/Server architecture (Client -gt MM server)
• GUI development library
• Tool control development
• SEMI SECS/GEM/XML standards
• Decision support system (smart dispatching system)

70
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES operation
• MES ??
• MES ???e ??????
• MES ??????

71
MES and E-commerce
TSMC Online
Production Information
Services Technologies
an overview of services and technologies
an array of up-to-date logistic status reports
Design Portal
Technical Documents
an integrated environment for IC design assistance
a virtual document center for providing one click
download
Business Transactions
Quality Reliability
book product names, submit service requests, and
access CyberShuttleTM services
policy and reviews on the process quality and
reliability information
Assembly Test
Customer Satisfaction
information on sort, assembly and final test
services.
status tracking for customer corrective action
request
72
MES and ERP
Demand Forecast
Purchase Order
73
MES and PDM
74
Outline

• ??Operation
• ??e???
• Manufacturing Sequence Flow
• Why MES (factory operation point of view)
• Why MES (Industry point of view)
• MES ??
• MES ??
• MES ??
• MES operation
• MES ??
• MES ???e ??????
• MES ??????

75
Future Direction of MES

• Scalability (support considerable transaction for
  bigger FABs and detail information)
• System centric operation instead of human-centric
  operation (knowledge operation)
• Simulation Capability is embedded for knowledge
  creation
• Industry information sharing instead local
  information sharing (Virtual FAB support)
• Friendly decision support system
• Exception handling become only thing for human
  operation

76
Future Direction of MES
knowledge base
man-machine
communication
operator
processdata base
logging
simulation
history
instructor
actualization
maintenanceengineer
process data
plant
77
Future Direction of MES
78
Q A