Title: Dr. JOS
1Pulsed laser deposition of oxide epitaxial thin
films.Recent results on Sr4Fe6O13
- Dr. JOSÉ A. PARDO
- Department of Materials Science and Technology,
- Aragón Institute of Nanoscience
- University of Zaragoza
2Pulsed Laser Deposition (PLD)
High-vacuum chamber
Substrate on substate heater
O2 pressure control
Rotating target (sintered ceramic)
3Pulsed Laser Deposition (PLD)
- Advantages
- Stoichiometric transfer of material (Complex
oxides YBa2Cu3O7-d) - Direct relation number of pulses- thickness (?
0.1-0.3 Å/pulse) - Few experimental parameters (T, PO2)
- Disadvantages
- Splashing (solid particulates and liquid
droplets) - Angular distribution of ablated material ?cosnq,
n?10 (small area or inhomogeneous thickness)
4Pulsed laser-matter interaction
Wavelength l Pulse duration t Energy per pulse
E Focused on area S Fluence F E/S
Peak power Pp E/t
Intensity I Pp/S
S
Optical absorptivity Thermal diffusivity Other
properties...
Roughly I ? 104 - 105 W/cm2 heating I ? 105
107 W/cm2 melting I ? 107 1010 W/cm2
vaporization and plasma formation
5PL-matterinteraction
D. BÄUERLE Laser Processing and Chemistry.
Springer (2000)
6Thin film nucleation and growth
7Models for epitaxial growth
Free-energy gs substrate free surface gf film
free surface gi substrate-film interface
gf
gs
gi
8Models for epitaxial growth
Frank-Van der Merwe (2-D layer-by-layer) gs gt gf
gi Volmer-Weber (3-D islands) gs lt gf
gi Stranski-Krastanov
9Features of (epitaxial) thin films
- Single crytals
- - Anisotropy
- - Very low density of high-angle grain
boundaries - High surface-to-volume ratio (surface effects)
- Some particualr growth-induced defects (stacking
faults, misfit dislocations, buffer layers...) - Epitaxial strain
- Influence of substrate (diffusion, chemical
reactions at substrate/film interface...) - Miniaturization (nanotechnology, sensors...)
- Alternated thin films Multilayers and
heterostructures (planar technology devices,
magnetic tunnel junctions)
MATERIALS WITH NEW PROPERTIES!
10Epitaxial strain
Deformation of film lattice to match the
substrate lattice
Lattice mismatch
Commensurate epitaxy Coherent strain
Strain e 1 Hookes law s E e s F /
Ao stress, e Dl / lo strain, E Young
modulus Oxides E 1011 Pa ?
mctc constant
Epitaxial stress s 1 GPa
- Substrate choice
- Compressive (afgtas) or tensile (afltas) strain
- Modulation of strain by substrate lattice
parameter - Modulation of the film properties
11La1.9Sr0.1CuO4 superconductors
PLD
Tc values Bulk LSCO 25 K LSCO/SrTiO3 (c) 10
K LSCO/SrLaAlO4 (t) 49.1 K !!!
12Multilayers of ionic conductors
l
Space charge region l 2LD
MBE
13PLD of Sr4Fe6O13 epitaxial films
- PEOPLE INVOLVED
- Barcelona - ICMAB J. A. Pardo, J. Santiso,
- C. Solís, G. Garcia, M. Burriel, A.
Figueras - (PLD, CVD, XRD, XRR, SEM, Impedance)
- Antwerp - EMAT G. Van Tendeloo M. D. Rossell
- (TEM, HREM and ED)
- Sacavém - ITN J. C. Waerenborgh (Mössbauer)
- Barcelona - ICMAB X. Torrellas (Synchrotron)
- Lisbon - FCUL M. Godinho (Magnetism)
14Sr4Fe6O13?
Parent member of the mixed conducting family
Sr4Fe6-xCoxO13
x 2 very high oxygen conductivity
s sel si
Intergrowth structure
c
a
Fe-O double layer
Perovskite-type layer Sr-Fe-O
b
Orthorhombic Iba2 a 11.103 Å b 18.924 Å
c 5.572 Å (A.. YOSHIASA et al., Mater.
Res.
Bull. 21 (1986) 175)
15Sr4Fe6O13/SrTiO3(100) films
b-oriented. Cube-on-cube epitaxy
J. A. PARDO et al., Journal of Crystal Growth 262
(2004) 334
16Lattice parameters vs. thickness
Sr4Fe6O13/SrTiO3 Thickness range t 15 300 nm
t lt 30 nm fully strained films
t gt 170 nm relaxed films
17Epitaxial strain vs. thickness
Sr4Fe6O13/SrTiO3(100)
? t -1 for misfit dislocation-mediated plastic
deformation
J. SANTISO et al., Applied Physics Letters 86
(2005) 132105
18Oxygen content vs. thickness
Sr4Fe6O13?/SrTiO3 films deposited under the same
O2 pressure Oxygen superstructure with
modulation vector q aam 13-d 122a
M. D. ROSSELL et al., Chem. Mater. 16 (2004) 2478
Strain relaxation through change in oxygen
superstructure
19Conductivity measurements
NdGaO3 substrates
Pt electrodes and wires
20Impedance spectroscopy
Furnace up to 800 ºC Controlled atmosphere O2,
Ar
Impedance analyzer HP-4192A (5 Hz - 13 MHz)
21Sr4Fe6O13/NdGaO3(100) films
b-oriented films. Cube-on-cube epitaxy
Plane matrix of Sr4Fe6O13? Needle-like
precipitates of SrFeO3-z
22Conductivity of SFO/NGO in O2
J. A. PARDO et al. Solid State Ionics (submitted)
Strong dependence conductivity-thickness
23Effect of stress on conductivity
Small polaron hopping s(T) (A/T) exp(-Ea/kT)
Conductivity increases under compressive
epitaxial stress
24Summary
- PLD is a versatile technique for the deposition
of high-quality epitaxial thin films of oxides. - The conductivity of epitaxial thin films of
Sr4Fe6O13/NdGaO3(100) strongly depends on the
film thickness. - This dependence is most probably due to the
effect of compressive epitaxial stress.