Sputtering and Thermal Effects on the Titania/Si Interface - PowerPoint PPT Presentation
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Sputtering and Thermal Effects on the Titania/Si Interface
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Annealing performed in vacuum sealed ampoules. Sputtering of TiO2 on Si(100) ... Annealing of TiO2 on Si(100) ... seen in film upon annealing of TiO2 up to 850 ... – PowerPoint PPT presentation
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Title: Sputtering and Thermal Effects on the Titania/Si Interface
1
Sputtering and Thermal Effects on the Titania/Si
Interface Patrick R. McCurdy, Laura Sturgess,
Sandeep Kohli, and Ellen R. Fisher, Colorado
State University
SEM/SAM of Annealed TiO2 Films
a)
b)
5 mm
5 mm
5 mm
10 mm
SEMas deposited
SEM850oC anneal
c)
d)
20 mm
20 mm
20 mm
20 mm
SEM950oC anneal
SAM of Si950oC anneal
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