Micro Electro Mechanical Systems

1
Micro Electro Mechanical Systems

• MEMS
• By Seth Austin

2
Materials and Fabrication

• Silicon is the dominate material used
• Excellent electrical and mechanical properties
• For High Temp. applications, SiC is ideal
• Other alternatives include TiNi (shape memory
  alloys)

3
Applications

• Both Military and commercial use
• Automobiles
• Airplanes
• Home Appliances

4
World Market

• Overwhelming commercial demand
• Drastic Increase in World-wide Sales

5
References

• Mehregany, M./ Roy, S. Microengineering
  Aerospace Systems. MEMS Market,
  www.aero.org/publications/aeropress/Helvajian/Helv
  ajian_1_4.html, 10 Feb. 2004
• MRS tackle MEMS materials issues 10 April
  2002, www.thinfilmmfg.com/subscribers/Subscriber02
  /mems10Apr02.htm, 10 Feb. 2004
• Bang, Chris. EETimes. Electrochemical method
  simplifies MEMS fabrification. 18 March 2002,
  www.eetimes.com/in_focus/communications/OEG2002031
  5S0052, 10 Feb. 2004
• Jakubczak, Jay. Vision for MEMS.
  Micromachines. www.sandia.gov/mstc/technologies/mi
  cromachines/vision.html, 10 Feb. 2004.