SEMICAPS DIFFRACTIVE SIL

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SEMICAPS DIFFRACTIVE SIL DiFFRACTIVE SILICON
IMMERSION LENS
Using Diffractive SIL to improve image resolution
Concept of Diffractive SIL Ring shaped pattern
etched into silicon that acts as a lens Pattern
diameter is typically 200um Alters the phase of
light traveling through it
Fabrication of Diffractive SIL Utilizing Focus
Ion Beam system (FIB) to etch out the ring
patterns Creates ring structures of high and low
regions. The ring sizes are tailored to specific
wavelength and thickness, achieving the desired
focal length Silicon steps are approximately
268nm in height Total fabrication is
approximately 25 minutes
Application As shown from the TIVA images
obtained from SOM 3000 system, image resolution
has improved significantly with the the
diffractive SIL