Digital Camera and Computer Vision Laboratory

1
AOI(Automatic Optical Inspection )

• Presented by ??? ???
• 0917533843
• r94922081_at_ntu.edu.tw
• ???? ??? ??

2
Camtek

• Camtek provides intelligent optical inspection
  systems.
• Semiconductor Manufacturing and Packaging
• High-Density Interconnect Substrates
• Printed Circuit Board

3
Semiconductors

• Ensuring high production yields and reliable
  service life of the device.
• Defects in the active die area, may lead to
  device failure.

4
A Natural Born Defect Hunter

• Falcons are nature's fastest birds.
• Their acute eyesight and flying skills enable
  them to capture their target in mid-air.
• Trained falcons have been used by royalty for
  hunting since early ages.
• Camtek's Falcon offers similar qualities
• Keen vision to detect minute defects, and the
  speed to do it in rapid motion. But training our
  Falcon is much easier.

5
Falcon 500

• A series of advanced optical inspection systems
  for wafers.
• Designed to ensure known-good die.
• Detects visible defects that may impact die
  integrity or interconnect reliability.

6
Falcon 500 Working Theory

• Dedicated algorithms analyze probe marks to
  determine their size, proximity to pad edge and
  number of touch-downs.
• Equipped with the Camteks optional Confocal
  Chromatic Height Sensor (CCS), the Falcon 500 can
  even plot sampled probe mark profiles.
• Proprietary optics provides high resolution and
  contrast.

7
Falcon 500 Working Theory(cont)

• Bright and dark field illuminations bring surface
  irregularities out while obscuring normal process
  variations
• Working together, the Falcons optics,
  illuminations and sophisticated algorithms
  provide superb detection with minimal false call
  rate. Intelligent and intuitive recipe setup
  adapts detection performance to user preferences.

8
Falcon 500
9
Falcon 500 Working Theory(cont)

• Performance Highlights
• High throughput for 100 inspection at production
  rates
• New adaptive probe marks analyzing algorithm
• Superb surface defect detection
• Optional 3D measurement capabilities
• Fast, easy and intuitive setup