Future

1
Future
Summary
MEMS Simulation and Modeling with SUGAR 2.0beta
Jason Vaughn Clark, Ningning Zhou, David Bindel,
James Demmel, Kris Pister
Berkeley Sensor and Actuator Center, University
of California at Berkeley. Free on the web at
http//www-bsac.berkeley.edu/cfm
ALGORITHMS
Transient analysis
Sensitivity analysis
Steady-state analysis
Static analysis
Spice-like environment
MODELS
MEMS representation in SUGAR
Transformations
Accelerating Frames
Electrostatic Gap
Thermal Expansion
New nonlinear beam model Plate model (prelim)
Residual stress strain gradient
RESULTS
Transient response of a gap-closing actuator
Optical Scanner Modes KSJPister
DY
The strain gradient shown here is two orders of
magnitude larger than that of the BiMEMS process
in order to visually display the doming of the
backbone and the bending down of the fingers.
Subnets used for serpentine parameterization
GKFedder
Two-degree-of-freedom optical scanner prototype.
Mode 1 739Hz, mode 2 745Hz.
Netlist Parameterization