Semiconductor Manufacturing Technology

1
EE-354
Integrated Circuit Technology
Various I. C. Devices Semiconductor
Manufacturing Technology(Ch. 3) Michael Quirk
Julian Serda

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Active Component Structures

• The pn Junction Diode
• Enhancement and Depletion-Mode MOSFETs
• The Bipolar Junction Transistor
• Schottky Diode
• Bipolar IC Technology
• CMOS IC Technology

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Basic Symbol and Structure of the pn Junction
Diode
Figure 3.5
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Forward and Reverse Electrical Characteristics of
a Silicon Diode
Figure 3.9
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CMOS IC Technology

• The Field Effect Transistor
• MOSFETs
• nMOSFET
• pMOSFET
• Biasing the nMOSFET
• Biasing the pMOSFET
• CMOS Technology
• BiCMOS Technology
• Enhancement and Depletion-Mode

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Two Types of MOSFETs
Figure 3.15
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Biasing Circuit for an NMOS Transistor
Figure 3.16
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NMOS Transistor in Conduction Mode
Figure 3.17
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Example of Characteristics Curves of an
N-channel MOSFET
Figure 3.18
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Biasing Circuit for a P-Channel MOSFET
Figure 3.19
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PMOS Transistor in Conduction Mode
Lamp ON
Figure 3.20
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Comparison of Enhancement and Depletion Mode
MOSFETs
Figure 3.26
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Schematic of a CMOS Inverter
Figure 3.21
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Top View of CMOS Inverter
Figure 3.22
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Cross-section of CMOS Inverter
Figure 3.23
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Latchup in CMOS Devices
Parasitic Junction Transistors within a CMOS
Structure
Figure 3.27
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Parasitic Capacitance in Transistors
Figure 3.4
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Cross Section of an NPN Bipolar
Figure 3.13
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Two Types of Bipolar Transistors
Figure 3.10
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NPN Bipolar Biasing
Figure 3.11
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PNP Bipolar Biasing
Figure 3.12
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Cross Section of Parasitic Resistances in a
Bipolar Transistor
Figure 3.2
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Simple BiCMOS Inverter
Redrawn from H. Lin, J. Ho, R. Iyer, and K.
Kwong, Complementary MOS-Bipolar Transistor
Structure, IEEE Transactions Electron Devices,
ED-16, 11 Nov. 1969, p. 945 - 951.
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Examples of Resistor Structures in ICs
Figure 3.1
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Examples of Various Capacitors in ICs
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Schematic Symbol and Structural Cross Section of
the Schottky Diode
Figure 3.14
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New Concepts in this Lecture

• Forward and Reverse Diodes (3-4)
• MOSFETS Definition, types, electrical
  characteristics (6-12)
• CMOS Invertor Circuit (13-15)
• CMOS Latchup (16)
• Bipolar Transistors (18-22)
• BiCMOS Circuits (23)
• IC versions of Resistors and Capacitors (24-25)