Sequential parylene lift-off process for selective patterning of biological materials

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Sequential parylene lift-off process for
selective patterning of biological materials
K. Kuribayashi , Y. Hiratsuka , T. Yamamura and
S. Takeuchi Institute of Industrial Science, The
University of Tokyo MEMS 2007 p501504

• Advisor Cheng-Hsien Liu
• Reporter Y. S. Lin
• Date 2007/4/18

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Outline

• Introduction
• Fabrication
• Results Discussion
• Conclusion

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Introduction

• Multiple patterning of various types of
  biological material on the same substrate is an
  important technical challenge to realize
  high-throughput and high-sensitive bio-chemical
  analysis

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Introduction (cont)

• Parylene(poly(para-xylylene))
• 1.with organic solvents
• 2.produce arrays on large area with high
• resolution using standard photolithography
• 3.easily peel off from the substrate
• 4.its transparency

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Fabrication
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Results Discussion
1st patterned red dyed lipid was dissolved by the
2nd organic solution with green dyed lipid and
diffused under the parylene sheet due to low
adhesion between the parylene sheet and the
substrate
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Results Discussion
1st patterned red dyed lipid was dissolved by the
2nd organic solution with green dyed lipid and
diffused under the parylene sheet due to low
adhesion between the parylene sheet and the
substrate
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Results Discussion
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Results Discussion
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Results Discussion
10µm thick(20mm20mm)
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Results Discussion
10µm thick(20mm20mm)
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Results Discussion
Feasibility of Intermediate layer
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Conclusion

• This sequential parylene lift-off process
  provides an efficient and economical method for
  selective patterning of various types of
  biological materials
• The biological materials such as lipid and
  proteins were patterned on the same substrate in
  both 2D and 3D configurations