Title: Performances of epitaxial GaAs detectors
1Performances of epitaxial GaAs detectors
- E. Bréelle, H. Samic, G. C. Sun, J. C.
Bourgoin - Laboratoire des Milieux Désordonnés et
Hétérogènes - Université Pierre et Marie Curie (Paris 6)
2Introduction
- Material for X-ray imaging
-
- Bulk
Epitaxial -
- Semi-insulating
Thick enough - Large defect concentration,
Low defect concentration, - ?Non-uniform electronic
properties Residual doping (1013-1014
cm-3) - ?Short life time
?Small depleted depth -
- Imaging at room temperature
-
- Bulk CdTe
Epitaxial GaAs (InP,
GaP..) - Limited area
Large area - Bad homogeneity
Homogenous - No technology
Existing technology -
? Limitation in space
charge region
3Aim of the work
Epitaxial GaAs detector
4What has been achieved by Chemical Reaction
method
A. Growth of thick epitaxial GaAs layers
100-500 µm thick layers Homogenous
electronic properties Electronic properties
similar to that of standard epilayers
B. Pixel technology Polishing Ion
implantation annealing Photolithography
Chemical etching Si3N4 deposition
Metallic alloy deposition
5What has been achieved by Chemical Reaction
method
C. Photo current induced by X-ray
6Results
- 1. Proton detection
- GaAs detector 2 mm2, 4.3 x 1014 cm-3, bias of
100 V (depleted depth 18.4 µm) - Retrodiffusion of 1.2 MeV (a) and 1.3 MeV (b)
protons
7Results
- 2. Electron detection
- Si detector 25 mm2, depleted depth 100 µm at 50
V - GaAs detector 2 mm2, depleted depth about 13 µm
at 50 V.
8Results
-
- 3. Alpha detection (241Am)-5.49 MeV
- Bias of 80 V
9Results
-
- 4. Gamma detection (241Am)- 59 keV
- Cooled at 50C, at bias of 70V
-
-
10 Conclusion
- Good energy resolution
- Width of the space charge region, small !
- Decrease of the residual doping
- Work in photocurrent
- 3. Optimise the technology of the detector.