APSXFD Automated Etching System

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APS/XFD Automated Etching System

• Michael Wieczorek, Ruben Khachatryan, Al
  Macrander, Kurt Goetze, and David Kline
• 7/29/2005

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Disadvantages of Current Manual Process Used to
Etch Si and Ge X-ray Optics

• The manual process is subject to error due to
  human intervention
• Freedom of movement for the individual performing
  manual etching is severely restricted
• The etcher is subjected to repetitive wrist
  motion for an extended period (typically 12
  minutes or longer)
• Although the etcher uses PPE, an accident may
  occur in the fume hood subjecting the etcher to
  hazardous chemicals (HNO3 and HF acids)

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Advantages of An Automated Etching System for
Etching Si and Ge X-ray Optics

• A computer program accurately controls all
  etching operations from start to finish
• The etcher is free to perform other functions
  during automated etching
• Repetitive motion is now performed by a machine,
  and
• A chemical/mechanical accident will not harm the
  etcher since no part of the body is inside the
  fume hood during automated etching

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Functionality Features of the Automated Etching
System

• Equipped with recessed cutouts for accurate
  placement of fluid containers
• Mechanical components coated with spray-on
  teflon to prevent corrosion
• Four recipes available to the user that contain
  the settings to perform the etching process at
  different heights, speeds, and durations
• Calibrate, home, start, pause, resume, and abort
  buttons
• Calibrate - finds the high / low of the etching
  system (since there is not a feedback encoder on
  the motors, calibrate provides the mechanism for
  finding the x / y limits of the system).
  Calibrate should be the first button depressed
  after a system reboot.
• Home - places the etching system in a known,
  user-defined home position.
• Start - begins the etching process given the
  user-specified input for the chemical and water
  positions.
• Pause - halts the current motion.
• Resume - resumes operation from being paused.
• Abort - halts motion immediately.

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Main (Startup) Window for the Automated Etching
System
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Setup Window for the Automated Etching System
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Automated Etching