16site Neural Probe Design

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16-site Neural Probe Design
Trace width 5?m Site size 10 ?m 10 ?m
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Process Flow

• SOI wafer
• Coat parylene as an insulating layer, deposit and
  pattern (lift off) Ti/Au as the electrode traces
  and the bonding pads
• Coat and pattern (plasma etch) parylene to open
  the electrode sites and the bonding pads
• Deposit and pattern (lift off) Ti/Pt as the
  electrode sites
• Deposit parylene as a protective layer and
  pattern it
• Font side silicon etch
• Back side silicon etch
• Oxide etch and resist strip