10 equations that everyone in MEMS should know

1
10 equations that everyone in MEMS should know
2
Hookes law F-kx

• K 3EI/L3
• K JG/L

3
Fluidic damping

• Couette
• Squeeze-film

4
Electrostatic force

• Voltage term
• Geometry term
• Constant charge
• Paschen curve

5
Newtons second Fma

• M \fracaxb xKxF_ext
• H(s), H(0), H(j\omega),
• Resonance, Q

6
Heat flow qdot g delta-T
7
Virtual work

• F-grad U

8
Equipartition theorem U1/2kBT
9
Ohms law VIR

• Kirchoffs laws

10
QCV

• Ceps A/d

11
Heat capacity
12
KVL and KCL

• For electronics, fluidics, and general Lagrangian
  systems (e.g. SUGAR)

13
Conservation of energy