Dias nummer 1

1
COSMOS Components and Smart Machines
with Micro-Nano Surface Embedded Sensors
2
The Vision

• Improved interaction between human and machines.
• Smart machines with imbedded sensors will improve
  safety, lifetime and performance.
• Short periods with improper operation with
  critical parameters may be avoided.
• Create intelligent surfaces of the future.

3
The Goal

• Develop a sensor embedded into a strong, self
  lubricating, diamond like carbon (DLC) coating.

CVD DLC
CCr-CrN layer
Embedded Sensor
Substrate
4
Cross-disciplinary task
Sensor design and technology
3D structurization
Sensor test
Surface embedded sensors
Coating test
Interface Wiring and electronics
DLC coating technology
5
The Team

• Acreo
• Peter Leisner
• Sintef,
• N. Peter Østbø
• Danish Technological Institute
• Lars Pleth Nielsen
• VTT
• Helena Ronkainen

6
Danish Technological Institute (DTI)

• Responsible Centre Manager, M.Sc., Ph.D.
• Lars Pleth Nielsen
• Contribution
• Plasma-enhanced Si3N4 as a potential electric
  insulator
• Wear-resistant PVD/CVD coatings
• Ion beam accelerator for metal doping of DLC
• Thermocouple based on e.g. copper/constantan
• Testing of sensors and coatings

7
Acreo AB, Sweden

• Responsible Manager, Ph.D. Peter Leisner
• Contribution
• 3D-micro structuring
• Sensor design
• Wiring and electronic connectors to sensor unit
• Interface to the surrounding

8
Sintef/MiNaLAB, Norway

• Responsible Research Scientist, Ph.D. (Dr. ing.)
  
• N. Peter Østbø
• Contribution
• Know-how and capability within piezoelectric thin
  films
• Plasma-enhanced Si3N4 (restricted to compatible
  substrates)
• ALD coatings (advanced oxides, nitrides etc.)
• 2D-3D micro structuring
• Sensor design
• Materials and chemistry (polymers, wear-resistant
  coatings)

9
VTT Technical Research Centre of Finland

• Responsible Senior Research Scientist, Dr.
  (Tech.)
• Helena Ronkainen
• Contribution
• Sensor design
• Wear-resistant coatings Diamond like carbon
  coatings
• Integration of piezoelectric material (e.g. AlN)
  with patterned MEMS structures
• Integration of electronics
• Tribological test of sensor structures