UC Berkeley TCAD Research

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UC Berkeley TCAD Research
Professor Andrew Neureuther
2001 Ka Chun Ng Hiral Patel 2000 Steve Lee Ka Chun Ng Takashi Orimoto Elmo Pittenger 1998/9 Toshihiro Horie Timothy James Vinson Lee Ran Shen 1997 Jeffery Cheng Peter Chien Chang Hsu Rona Yang

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Simulators

• SPLAT Simulation of Profile and Lithography
  Analysis Topography simulates
  2-dimensional projection-printing with partial
  coherence based on Hopkins theory of
  partially coherent imaging
• SAMPLE-2D Simulation And Modeling of Profiles
  in Lithography Etching simulates
  time evolution of topographical features of IC
  devices during multiple process
  steps
• SAMPLE-3D simulates lithography and topography
  in three-dimensions
• TEMPEST Time-domain Electromagnetic Massively
  Parallel Evaluation of Scattering
  from Topography
• STORM Simulator Tool Of Resist Modeling
• SIMPL SIMulations of Profiles from the
  Layout generates cross-sections of IC chips
  given a fabrication process

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Simulation Types
Table-Driven SimulationClient needs to
understandhow the simulator works andinput the
correct parameters
Java AWT Applet SimulationProvides an
easy-to-use user interfaceto hide the simulator
detailsClient can adjust parameters
viagraphical and textual supports
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Simulation Process
Server
Client
CGIRequest
Java Script Form or Java Applet
CGIusingPERL
Simulator
CGIResponse
Post-Process
Java Plotterembedded in HTML
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Probe-Based Aberration Target Applet
View Selected Target
Line intensity plot with and/or without
aberrations,as well as 2-D contour output
available

• Major Enhancements
• Enable Zernike Aberrations
• Demonstration of research targets

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Millennium TEMPEST/E-Beam Projects
Cuervo
Main IdeaSome simulation, such as TEMPESTand
E-Beam, are time and resource intensive. By
exploiting the idea of parallel processing, we
can cut downthe simulation time by a factor of
1/(num of computers) in theory. Millennium
network consists of 50computer cluster for
multi-processing Main obstaclesCross platform
simulationMultiple operating systemsSyncronizati
on
Java/Perl
PHP
C
Millennium
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Phase-Shifting Mask Edge Effects

Main idea instead of calculating the Fourier
transform of the ideal mask using SPLAT, we can
use a mask Fourier cofficents file generated by
TEMPEST to get output from SPLAT
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STORM-2D Simulation Java Plotter
SPLAT contour output2D target image intensity
dataPEB Parameter File
STORM 2D outputacid and deprotection data
STORM-2D Java Plotter
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LAVA User Statistics Spring 2001
SPLAT.pl 1246 times SAMPLE-2D.pl 576
timesSAMPLE-3D.pl 462 times
14,000 requests/month
Top 20 OrganizationsTop of the list -
googlebot.com
Visits by Organization Types
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Summary and Future Remarks

• 1997/98 Website development and basic
  infrastructure
• 1999/20 Application applets targeted toward
  education and demonstration
• 2001 Interactions between different
  simulators, multi-processing, and applicaton
  applets targeted toward research and
  demonstration
• 200? - Stand-alone programs of individual
  applets on clients PC? Development of java
  applets for advanced simulation? (I.e. an
  universal mask editor similar to
  Cadence?) Experiments with Swing applets (more
  advanced than java awt)? Smarter, configurable
  java plotters for each simulators?
• LAVA website cuervo.eecs.berkeley.edu/VolcanoRes
  earch website cuervo.eecs.berkeley.edu/Volcano/re
  search/index.htmSRC Lithonet website
  lithonet.eecs.berkeley.edu/mc460review.html
• Millennium website webdev.millennium.berkeley.edu
  /tempest/tempest.php