Title: Precision Replication of Micro-Optics Through Injection Molding
1Precision Replication of Micro-Optics Through
Injection Molding
David Gill -- Dr. Thomas Dow -- Alex Sohn
Precision Engineering Center -North Carolina
State University
2Project Goals
- Accurately Replicate Micro-Optics Using the
Injection Molding Process - Find The Injection Molding Factors That Have the
Greatest Effect on the Replication of Micro-Optics
Blaze Grating Dimensions in nm
3 Presentation Outline
- Injection Molding Process Factors
- Design of Experiment Process Factors gt
Replication Fidelity - Micro-Optics Features
- Research Results
4Nissei HM-7
- Machine Characteristics
- 6.2 cm3 Shot Size
- 102 mm Tie Bar Spacing
- 7 Ton Clamping Force
- Hydraulic Actuation
- Water Based Mold Temperature Control
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6Injection Molding Process Factors
7Design of Experiment
(More Than 3000 Parts)
- Selected a High and Low Value for Each Factor
- Both Values Must Create a Measurable Part
Assumptions - Linear Response Between Factor
Values - No Interaction Between Factors
8Micro-Optic Features
Depth
Aspect Ratio
Width
9Feature Measurements
- Astigmatism
- Coma
- Spherical Aberration
- Residual RMS
- Residual PV
- Grating Step Height
- Wedding Cake Step Height
Phase Interferometer White Light
Interferometer Stylus Profilometer
10Replication Fidelity Achieved
- Blaze Grating Step Height Error
Fresnel Residual RMS Error
76 nm
Sphere Residual RMS Error
Wedding Cake Step Height Error
1.8µm (0.9)
11Fresnel Replication
1mm
Mold
PMMA Lens
12Blaze Grating
50µm
20µm
131/p
14Optimization of DOE Results
15Summary
- Injection Molding Process and Factors in Molding
- Design of Experiment
- Micro-Optical Features and Measurement Methods
- Results of the DOE
- Confirmation of the Results
16Conclusions
- Repeatable Replication of Micro-Optics is
Possible Using Injection Molding - Molding Factors Influence the Replicated Shape of
Micro-Optics - Mold Temperature and Screw Rotation Speed Have
the Greatest Impact on Replication Fidelity
The authors wish to acknowledge the support of
this research by the National Science Foundation
(grant 9908223, Dr. K. P. Rajurkar, Program
Director)
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