Fab Automation Standards – SECS/GEM & EINNOSYS SOLUTIONS

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Fab Automation Standards SECS/GEM EINNOSYS
SOLUTIONS
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• The organization that defines and governs the
  standards for semiconductor manufacturing,
  equipment, automation and other relevant areas is
  SEMI.org. It is an international body for
  semiconductor manufacturers and equipment
  manufacturers. Factory automation standards
  defined by SEMI are generally known as SECS/GEM
  standards, which for 200mm wafer processing is
  comprised of four main standards SECS-I (E4),
  SECS-II (E5), HSMS (E37) and GEM (E30) standards.

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Lets understand what each standard covers

• SECS-I (E4) This standard is a communication
  protocol based on RS-232 serial communications.
  This is a much slower as compared to HSMS.
• SECS-II (E5) This standard defines how
  information is passed between an equipment and a
  factory host in the form of a series of stream
  and function messages.
• HSMS (E37) This standard defines a communication
  protocol based on TCP/IP.
• GEM (E30) This standard not only defines how to
  use the core SECS-II messages to perform
  particular tasks, such as event report, data
  collection and recipe management but also takes
  care of the behaviour of the equipment when
  interfacing with the host.

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• Since SECS/GEM is a communication protocol, it is
  technology, platform as well as programming
  language independent. The host side of a
  connection is run on a computer system typically
  provided by the fab, and the equipment side of a
  connection is executing on a controller computer
  provided by the equipment manufacturer. This
  gives both the factory as well as the equipment
  manufacturer interoperability, flexibility and
  platform independence. Both, the fab and the OEM
  can develop their software application without
  having to worry about communication
  compatibility, as long as they both are adhering
  to SECS/GEM standards.

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• SECS/Gem standards define the communication
  between a host computer and the equipment
  typically using a single connection, however
  multiple connection from more than one automation
  systems to a single equipment is possible. The
  message types defined by SECS are partially
  asymmetric some message types are defined only
  for equipment use, others are defined only for
  host, but also many of the messages are for the
  similar use on either side.

The practice of connection sharing is not
recommended for new deployments. It is a
prevalent practice that a connection is
maintained for long periods of time and only
interrupted if the equipment or host is rebooted.
SECS connections are light and dont use much
network bandwidth. It is possible to run several
SECS connections on a simple desktop computer.
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• Most Semiconductor, solar cell, FPD and LED
  manufacturing factories are demanding the
  equipments that are SECS/GEM standard compliant.
  For those who are not familiar with SECS/GEM
  standards, to learn and implement these standards
  on the equipment software can be quite complex,
  challenging and time consuming. That is why, we
  at eInnoSys offer SECS/GEM software solutions for
  equipment manufacturers as well as factories.
• Integrating eInnoSys EIGEMEquipment plug-n-play
  software with equipment controller software of an
  equipment, OEMs can significantly reduce the time
  and cost it takes to make their equipment
  SECS/GEM compatible. Similarly, EIGEMHost is a
  SECS/GEM software for FABs and ATMs (Assembly and
  Test Manufacturing) to communicate with various
  equipment in the factory. EIGEMSim is a simulator
  software for SECS/GEM testing. It is a software
  that can be used to simulate as a equipment or
  host to test SECS/GEM communication of the other.

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Thank You

• www.einnosys.com

info_at_einnosys.com