Properties of Nanodomain Polymer Derived SiCO

1
Properties of Nanodomain Polymer Derived SiCO

• Dongjoon Ahn
• (Dongjoon.Ahn_at_Colorado.Edu)
• University of Colorado at Boulder
• Department of Mechanical Engineering
• Advisor Prof. Rishi Raj

2
Background Objective

• Problems facing current in the Microelectronics
  Circuit
• Signal Propagation Delay
• Cross-talk
• Power Consumption
• The best way to reduce the Limitation
• Use low dielectric constant material
• SiCO as a candidate
• Low dielectric constant lt 2.0
• Thermal and Mechanical stability at high temp.
• Find the low dielectric constant material

3
Research Tasks
Current work for introduction to research

• Measure the dielectric properties of SiCO thin
  films
• Thickness
• Capacitance
• Leakage Current
• Apply the SiCO to actual devices
• Low Dielectric Constant
• Higher Thermal Mechanical Stability

Future work
4
Methodology (Fabrication)
Making Precursor
Coating Patterning
Heat Treatment
Gold Coating
Measurement
Process
Cross-linking
Spin-Coating
Sputtering
Measuring Dielectric Property
Densification
UV Lithography Polymerization
Detail Step
Pyrolysis
Annealing
Check Point

• Thickness
• Capacitance
• Leakage Current

• Chemical
• Composition

• RPM of Spinner
• Wave Length

• Temperature

Out put

• Liquid Precursor

• Interconnection
• Si/Insulator/metal
• configuration

• UV Cured Patterned
• Gel Polymer

• ILD Material on Si wafer

• Dielectric Constant

5
Methodology (Measurement)
ltSi/Insulator/metal configurationgt
Gold
Thickness Measurement (by Optical Ellipsometer)
SiCO
Si Wafer
ltDetail Structuregt
Apparatus of Measurement Thickness Optical
Ellipsometry (AutoEL-II, RUDOLPH
RESEARCH) Capacitance Leakage Current
Impedance Spectroscopy
(HP 4192A LF
IMPEDANCE ANALYZER)