?PDMS???? ????CMOS MEMS?????

1
?PDMS????????CMOS MEMS?????
??? ??? ??? ???
?????
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?1??2??????????????,IC????PDMS?????,???????IC?PDMS
????????????????????????????????????????????????,?
?????????,??????????????????????????,?????????PAD,
??????????
??????CMOS MEMS???????????????????????????MEMS??,?
?CMOS-based??????,???????????????????CMOS
MEMS??????????,??PDMS?????IC??????????????????????
???,????IC?????,????????????????????????IC,??????I
C??????????????????,?????IC???(????)???,??????????
??????(????)???,????PDMS???????,??????????????????
?
? 2???????PDMS???,?????a ????? a
?,?????????,????????????????
? 3???PDMS????? (a) ? IC ????? (b) ?? PDMS (c)
?????PDMS?IC??? (d) ? PDMS????? (e) ????? (f)
??E-Beam?? Cr? Au (g) ?? lift-off ?????? (h)
??????PDMS ???????PDMS??????????