Micro to Nano Technologies

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Micro to Nano Technologies

• By Brent HareLenox laser
• March 30, 2004

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Micro to Nano Technologies

• Micro - Prefix meaning one millionth, 1/1,000,000
• Nano Prefix meaning one billionth,
  1/1,000,000,000

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The Powers of 10
100 1 Meter
10-1 10 Centimeters
10-2 1 Centimeters
10-3 1 Millimeter
10-4 100 Microns
10-5 10 Microns
10-6 1 Micron
10-7 1,000 Angstroms
10-8 100 Angstroms
10-9 1 Nanometer
10-10 1 Angstrom
10-11 10 Pico meters
10-12 1 Pico meter
10-13 100 Fermis
10-14 10 Fermis
10-15 1 Fermi
10-16 0.1 Fermis
10-17 0.01 Fermis
10-18 0.001 Fermis
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Current Micro Technologies

• Photonics - Optical Apertures and Flow Orifices
• Electronics Semiconductor chips, anodic bonding
• MEMS Micro Electro Mechanical Systems
• Communication Fiber optics, switching
  interconnects
• Biotechnology - cell filtration, drug discovery

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Current Nano Technologies

• Molecular manufacturing Precision down to the
  atomic level
• Nanotubes Building advanced lightweight
  materials as well as advancements in LCD
  technologies
• Medicine Devices that will flow through the
  circulatory system
• Nanocomposites Assisting in vast improvements
  in material compositions
• Electronics Advanced CMOS and silicon
  transistor integration with lithography

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Micro scaling to Nano
Click Picture to watch Nanotechnology movie
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Micro - Optics

• Ability to drill to ½ micron for half the
  wavelength
• Micromirrors for next generation telescope optics

Micromirrors
Microlens Arrays
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Micro - Electro

• Pentium 4-
• Top speed 3.4ghz
• Built on a 0.13 micron die
• 168 million transistors on 200mm2

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Micro - Chemical

• Miniature fuel cells
• Micro channels
• Chemical reactors

Micro Chemical Channel
Micro Fuel Cell
50 Micron Chemical Reactor
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Micro Flow Devices
Swagelock has begun to minaturize its flow
components

6in. x 18in.
3ft. X 4ft.
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Micro - Engineering

• Micro gears
• Micro embossing and stamping
• Microactuators (Tiny Motors)
• Micro-valves

Micro embossing
Micro-valves
Complex Ratchet
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Micro - Mechanical
Microactuators tiny motors
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Micro Mechincal
Worlds smallest steam engine, the pistons are 5
microns and it actually works
Micro Clutch mechanism, gears are 50 microns
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Microfluidics
Print Cartridges

• Capillary uptake
• Piezoelectric inkjets
• Flow sensing
• Drug dispensing
• Flow based separation

Lab-On-Chip for DNADetection and Analysis
Micro Canals
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Micro Communications

• Full optical switching technologies
• Most fiber optic backbone in the United States
  ranges from 1.3 to 1.5 micrometers and can
  transmit over 5 GBps and can span 93 miles

Fiber optic switching
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e-blox (Scaleable, Interfaceable, Stackable)

• Micro to nano interfaces for simple solutions
• e-blox allows you to build backbones connecting
  Gas, Liquid, Electro, Optical Fiber/Micro, and
  nanotechnologies in order to build unique devices
  for MEMS and other technologies
• Imagine devices built with the integration of all
  of these competing technologies on a Scaleable,
  Interfaceable, Stackable solution at the micro
  and nano level

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MEMS (Powder Metal Die Casting for building small
parts)

• The ability to arrange particles and then
  compress them into a die to build ultra small
  parts that can be used in MEMS technologies i.e.
  e-blox
• They have the ability to create miniature tools
  and dies to help build MEMS technologies

Micro Sensor 0.051mm
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Rapid Prototyping

• Use of 3D CAD modeling with SolidEdge
• 3D Scanning Technologies Use of lasers and
  optics to scan surface objects
• 3D Holography Technologies Holograms for real
  visualizations

3D CAD Model
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Electroforming Technologies

• Electroforming is the process of fabricating a
  part from the plating itself. A shaped mandrel is
  plated long enough to build up a "stand alone"
  thickness. The mandrel is then removed by
  melting, chemically etching or exploiting
  differences in thermal coefficients of expansion
  between the electroformed part and the mandrel.

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Etching Technologies

• Wet Etching Dissolves materials with chemicals
  and the use of masks
• Dry Etching - ion etching (RIE), sputter etching,
  and vapor phase etching are used by blasting the
  material surface with ion gases

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Lithography Technologies

• Lithography is a printing process where image
  areas and non-image areas are separated
  chemically
• Silicon semiconductor companies use extremely
  small masks to mark silicon wafers with 248 nm,
  193nm, and now 13.4nm wavelengths of light

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Piezeo electronics (for micro to nano movement)

• Pizeoelectronics are materials that produce an
  electrical response to a mechanical force.
• Can be used in Vibration Monitoring, Imaging
  Arrays, Doppler Probes, Biotech, Pharmaceutical,
  and Industrial Process Control

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First NanoChips

• Integrated circuits can be made down to 50nm
• 50nm chips are made using 193nm lithography
  (smaller than a wavelength so they use
  diffraction corrections)

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Next Generation Nano Lithography

• To build chips smaller than 50nm, new lithography
  technologies must be created The above
  technology can use 13nm ultraviolet wavelengths

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Nano Biotechnologies

• Scientists have developed a way to use DNA for
  minuscule wires that can be used in
  nanoelectronics
• Ability to have insulated wires sized at 25nm and
  20 microns in length

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Nanotubes

• Conductive and high-strength composites
• Energy storage and energy conversion devices
• Sensors
• Medical drug delivery and DNA research
• Nanometer-sized semiconductor devices, probes,
  and interconnects

Nanotubes are built by arrangingseveral atoms in
a closed pattern to form an unbelievably small
tube