The EX5 Excimer Laser

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The EX5 Excimer Laser

• A total metal ceramic excimer laser with many
  advantages
• Low cost Mini laser
• Long gas lifetime
• Low cost of operation
• Computer controlled
• Air cooled
• High power in a compact table top package

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TYPE II SUPERCHAMBER Performance Highlights

• Total Metal/ceramic design
• Corona preionization
• New chamber material
• New direct drive blower
• New electrode design
• Active optics filtering for longer optics
  lifetime
• Improved optics material
• Increased bearing lifetime
• Increased gas lifetime
• Linear power with repetition rate
• Higher repetition rate
• 1 pulse to pulse stability
• Reduced parts count gas handling system
• Solid state thyratron

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EX5-F2 157nm PERFORMANCE

• Vacuum Ultraviolet at 157nm
• Single Fill gas lifetime 10 million pulses
• Static gas lifetime 10 Days
• Energy 2mJ
• Average power .65 W
• Stability lt2 RMS
• KF/16 purge flange included

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EX5 Specifications
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/2 12 20 8 6
Peak Power kW 250 1500 2500 1000 750
Average Power _at_ 250Hz 0.4 2.4 4.0 1.4 1.3
Average Power _at_ 500Hz 0.65 4.0 8.0 2.5 2.4
Repetition Rate Max. Hz2  250/500/750  250/500/750  250/500/750  250/500/750  250/500/750
Dynamic gas lifetime Pulses to 50 energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50 energy 10 days 20 days 30 days gt3 Months 30 Days
Pulse Length nS 8 8 8 8 8
Stability lt3 Standard Deviation lt3 Standard Deviation lt3 Standard Deviation lt3 Standard Deviation lt3 Standard Deviation
Tube Service 2 Billion Pulses 2 Billion Pulses 2 Billion Pulses 2 Billion Pulses 2 Billion Pulses
Beam Size, mm 3X 6 3X 6 3X 6 3X 6 3X 6
Divergence, mRad full angle 1 X 2 1 X 2 1 X 2 1 X 2 1 X 2
Cooling AIR AIR AIR AIR AIR
Timing Jitter 2nS Standard Deviation 2nS Standard Deviation 2nS Standard Deviation 2nS Standard Deviation 2nS Standard Deviation
Weight 15kg 15kg 15kg 15kg 15kg
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Dynamic Gas Lifetime
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Repetition Rate Performance
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Pulse to Pulse Stability
0.77 rms Stability _at_ 200Hz, 13.5mJ KrF 248nm
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EX5 Running Costs

• Running costs for 2 billion pulses
• ArF KrF
• Refurbishment after 2 billion pulses 7500 7500
• Premix gas cylinders 1500 1200
• Optics exchanges 7000 1150
• Total costs 16000 9850
• Cost per Thousand pulses 0.008 0.0049
• Running cost per hour at 200Hz 5.76 3.53
• Cost per pulse 0.8e-5 0.49e-5

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