Dayta Software

1
Dayta Software
IAC

• Software for Surface Analysis and Image
  Acquisition
• by
• John Day
• Interface Analysis Centre
• Bristol University
• 121 St Michaels Hill
• Bristol. BS2 8BS UK
• Tel. [phone]
• Fax [phone]
• emails.
• j.c.c.day_at_bristol.ac.uk
  r.k.wild_at_bristol.ac.uk

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Dayta is software
IAC

• to acquire secondary electron images
• to acquire XPS, Auger and SIMS spectra
• to acquire element maps, depth profiles
• to manipulate data
• to quantify data
• to perform experiments (Taskmanager)
• to control XPS, AES, SIMS instruments

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Image Acquisition
IAC

• The first screen has pull down windows
• File for saving etc.
• Acquire to acquire image
• Conditions to allow you to set specific
  conditions for the image
• Annotate to allow you to put text on the image
• Set Points to allow you to set positions for
  analysis
• Windows
• Stop to halt acquisition
• Help for assistance

You would click on Acquisition and the
image/mapping
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Setting conditions for Image Acquisition
IAC

• You can acquire an image or cycle the image
  choosing pixel sizes up to1024 x 1024.
• You can choose SED for secondary electron images
  or Auger for element maps
• Contrast can be set automatically or manually
• There is a mains lock facility to reduce
  electromagnetic noise from the mains power

Having set conditions click OK and return to main
menu or click acquire to record an image
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Image from our PHI 595 with Field Emission Source
IAC

• This is an image of a fracture surface of a 12
  Cr steel and contains grain boundaries and
  cleavage
• The micron marker is inserted by clicking on ?
  and typing in the magnification
• This image can be saved to disk by returning to
  file.

Points may be identified for analysis by clicking
on Analysis
6
Setting Points for Analysis
IAC

• Here 7 points have been set
• This is done by clicking on analysis, set
  points moving the cursor to the desired
  position, typing in a label and then clicking
  OK to finish or More to set more points.
• Linescans can also be set up by clicking on
  Linescan and setting the X,Y co-ordinates for
  the start and finish points using the cursor.
  (Linescans can be in any direction)

When analysis points are set spectra can be
acquired
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Instrument Control
IAC

• The Instrument is controlled from this window.
• We have standard windows for XPS, AES and SIMS
  and other windows for specialised applications.
• For each we have Settings Calibrate Ratemeter
  Bus Access.
• The example shows Instrument settings for a VG
  Microlab.

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Instrument Control - SIMS
IAC

• This example shows the Instrument Settings for a
  SIMS Quadrupole control.
• Magnetic Sector or others would differ.

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Instrument Settings - Calibrate/Ratemeter
IAC

• Calibrate allows the instrument energies to be
  modified.

Ratemeter gives a measure of the collected
signal. Both windows are similar for AES, XPS,
SIMS.
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Acquiring Spectra
IAC

• The spectral acquisition program appears with
  pull down boxes and a Log Book.
• All operations will automatically be recorded and
  saved in this.
• Pull Down Boxes are
• File to open, save etc
• Conditions to set spectrum parameters
• Run spectra, cycles, etch, depth profile
• Data Process manipulate data
• Quantification
• Redisplay zoom, superimpose etc
• Annotate add text etc
• Window
• Instrument set instrument parameters
• Stop acquisition
• Help

If the instrument is set correctly click on
conditions
11
Conditions for Spectra
IAC

• In this window you give the spectrum its file
  name (with a choice of structures), sample
  identification, and comments which are then
  automatically saved.
• You set spectrum parameters, start, finish,
  stepsize, dwell time, number of passes and the
  probe position (previously labelled on the
  image).
• You may set as many regions as you wish eg Wide,
  Fe, C, Ni, Cr etc. either using the Library or
  manually.
• Several experiments may be performed on
  individual points

When conditions set click acquire to start or OK
to return to main menu.
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Auger Spectrum
IAC

• After setting conditions and clicking on acquire
  the conditions are automatically set and spectra
  are acquired. The example is an Auger spectrum
  from a Ni base alloy from 0 to 1000 eV.

13
Data Processing - Manipulation
IAC

• Within this window you can
• Smooth with Savitsky-Golay (1-15pt), maximum
  entropy and running mean.
• Differentiate (1-15 pts)
• Background Subtract ( linear, Shirley)
• Change KE to BE (for XPS)
• Modify axes
• All these may be performed and output to new
  windows or to the source window on selected
  runs/areas or on all runs.

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Smoothed and Differentiated Spectra
IAC

• These are examples of the smoothing (15 pt
  Savitsky-Golay) and differentiation of the
  previous spectrum.

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Annotation
IAC

• To Annotate click on button
• Enter label
• Click OK
• Move label to desired position using the mouse
• Repeat as desired

16
Quantification
IAC

• Quantification can be performed on absolute or
  differentiated data.
• Peak position, width and sensitivity can be set
  from the library or manually
• Window settings can be checked and modified using
  Monitor feature.
• Settings can be saved
• Results are automatically output to Logbook but
  may also be output to Microsoft Excel
  spreadsheet.
• Quantification may be carried out on individual
  spectra or batches of spectra.

17
Monitoring Windows in Quantification
IAC

• After setting windows click on Monitor
• Each window is then displayed in turn
• Move either end of background to desired energy
  with right hand mouse button
• New window is automatically saved.
• When all regions have been viewed the spectrum is
  quantified and results output to logbook

18
Data Process - Peak Fitting
IAC

• To fit peaks to spectra a window is drawn around
  the area with the mouse
• Then a linear or Shirley background is removed
• The left hand mouse button is used to centre
  possible peaks
• The computer then adjusts the position, full
  width half max, peak height and gausian / lorenz
  ratio to give the best fit.
• Any of the above may be fixed or given a value
  relative to another (I.e. centre may be fixed at
  812eV or set 10eV above peak 2)
• The example shows the fit of 4 peaks to the
  nickel region of the spectrum.

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Redisplay of Spectra
IAC

• Spectra can be displayed with text and data
• Superimposed
• Regions expanded

20
Element Mapping
IAC

• Multiple maps may be acquired. Either line by
  line or pixel by pixel.
• To acquire maps click on conditions / mapping
• Set peak maximum and two backgrounds either side
  from the library, using the cursor or manually
  for each element.
• Select either
• Peak-background
• (Peak-Background)/Background
• Peak Height
• Set pixel size (eg 80x60, 160 x 120)
• Click OK and run maps.

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Phosphorus Auger Map from 12Cr Fracture
IAC

• This phosphorus map was acquired from a
  phosphorus peak that quantified to 2 at. of the
  grain boundary surface
• In our software the peak and both backgrounds are
  counted at each pixel prior to moving on to the
  next. This reduces the influence of noise spikes
  on the map.
• The resolution of the map is determined by the
  number of pixels. You can chose from 80x60 in
  steps to 640x480.

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High Resolution Element Maps
IAC

• Coating on a Ni base alloy
• Cr and Ni Auger Maps
• Image is 640 x 480 pixels
• Maps are 320 x 240 pixels

SEI
Cr
Ni
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Depth Profiles
IAC

• Depth profiles can be acquired from multiple
  positions and multiple elements
• Etch time per step, etch cycles or total etch
  time can be input. Changing one variable
• Peak - Background
• (Peak - Background)/Background
• Peak Height
• can all be recorded
• Peak energy and two backgrounds can all be input
  from the library, by cursor selected window or
  manually.

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Depth Profiles
IAC

• This is a depth profile through an oxide layer on
  tantalum.
• It was acquired with the oxygen KLL, the tantalum
  LMM and MNN peaks.
• The right hand boxes identify the elements (in
  this case 4) and the numbers signify 100 full
  scale deflection.

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XPS Analysis
IAC

• Recording XPS spectra is similar to Auger
• The file name, specimen and comments are entered
  and automatically saved
• Start and finish binding energies are input
  manually or from the library
• Step size, dwell time and number of accumulations
  entered.
• Spectra can then be acquired or conditions exited
  and the spectrum started from the Run button.

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XPS Spectra
IAC

• Examples of Widescan XPS and narrow scan XPS
  spectra recorded on a Kratos XSAM 800

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SIMS Spectra
IAC

• SIMS spectral acquisition conditions are similar
  to Auger
• The file name, specimen name, and comments are
  entered and automatically saved.
• The regions to be scanned are entered in terms of
  mass numbers (Daltons)
• The step size, dwell time and number of
  accumulations are entered.
• The spectrum can be run directly by clicking on
  acquire or by exiting and starting from within
  Run.

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SIMS Spectra
IAC

• A typical SIMS spectrum recorded on our field
  emission ion gun / magnetic sector SIMS system.
• The left hand display gives a linear display of
  the data
• The right hand display gives a logarithmic
  display of the data
• The two displays can be toggled between in Data
  Process

29
SIMS Element Maps
IAC

• These two images are recorded from a
  metallographically polished steel sample
• The top image is an ion induced secondary
  electron image
• The bottom image is a SIMS boron element map and
  shows boron, present in the bulk to a few ppm,
  segregated to the grain boundaries

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The Task Master
IAC

• The Task Master allows a series of procedures to
  be executed
• Allows depth profiles to be acquired with full
  spectra at each depth and variable etch times
• Spectra may be interspersed with maps and images

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Overlay of ElementMaps
IAC

• Element Maps may be overlaid using our combine
  program (? G.Meaden.).
• Maps may be overlaid and moved relative to one
  another to compensate for drift.
• This example is a combination of Cr (blue), Al
  (red) and Ti (Green) maps recorded from a coated
  Ni alloy.

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The Log Book
IAC

• The Log Book automatically saves all operations.
• Additional comments can be added.
• The log book can be saved as a text file
• This can be used as a Quality Assessment tool

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Transfer of Data
IAC

• All spectra, depth profiles, peak fits and
  superimposed spectra can be imported into
  wordprocessing packages such as MS Word by
  copying to clipboard in file and then pasting.
• All images and maps are saved as bitmaps and can
  be inserted directly into documents.
• A typical page in MS Word