Storage Tank Leak Detection by Quadruple Mass Spectrometer'

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Storage Tank Leak Detection by Quadruple Mass
Spectrometer.
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Storage tank Leak check
Check point
QMS
Process
Support line
QMS

• On line monitoring of leak at each chemical
  storage tank
• Multiple sample port connections
• Fully Automatic Control
• Floor stand type or Man Portable Type

QMS
Chemical leak
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Tank Leak Check
Vent Hall
Lining Coating
-Leak Chemical Fume Detection -On-Line
Monitoring -Quantitative Analysis -Real time
Analysis
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Nitric acid Leak check (HNO3)
Leak check zone
Base zone
Leak check zone
Base zone
Base zone
HNO3 Mass number 56, 57, 69
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Nitric acid Leak check (HNO3)
Base zone
Low contamination Leak check
High contamination Leak check
Base zone
HNO3 Mass number 56, 57, 69
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Ammonia leak check(NH3)
NH3 Mass number 15, 16, 17
High contamination Leak check
Base zone
Base zone
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Hydro fluoric acid(HF)
HF Mass number 19, 20
High contamination Leak check
Base zone
Base zone
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Clean room contamination data
Clean room zone
Low contamination levels in clean room
High contamination levels in clean room
Clean room zone
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Contamination of clean room(Methanol)
 
Clean room zone
Low contamination levels in clean room zone
Clean room zone
Methanol Mass number 31, 45, 29
High contamination levels in clean room zone
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Contamination of clean room(IPA)
 
Clean room zone
Low contamination levels in clean room zone
High contamination levels in clean room zone
Clean room zone
IPA Mass number 45, 31
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Contamination of clean room(Acetone)
Clean room zone
Low contamination levels in clean room zone
Clean room zone
High contamination levels in clean room zone
Acetone Mass number 15, 43, 58