Quality Test of L1 sensors

1
Quality Test of L1 sensors

• HPK 10 sensors
• Tested all, 6 sent to Fermilab
• Test structures, HPK 133 L00 CDF
• ELMA 9 sensors
• Tested 6 of 9

2
HPK

• V depletion 120V consistent
• I leakage at V depletion 50nA (except 07)
• Breakdown seen once s/n20 at 750V
• Strip leakage 0.04nA
• Poly resistor value ??
• Capacitance 70pF
• I dielectric LCR noise

Bad Channels
3
Bad Channels

• HPK01 none
• HPK03 bad strip 42
• HPK04 bad strip 346
• HPK06 PH 13, 47, 267
• HPK07 bad strips 27, 320
• HPK09 none
• HPK11 leaky 169
• HPK12 none
• HPK13 none Rpoly strange shape
• HPK20 none HPK claims two low Cac

Fermilab
4
Polysilicon Resistor

• Using 237 bias/no bias

5
Interstrip Resistor

• Using 237 Bias/NO Bias

6
Polysilicon Resistor

• Using 487 Bias/NO Bias

7
ELMA

• V depletion 26V
• I leakage at V depletion 50nA
• Breakdown ALL at 250-350V
• Strip leakage 0.15nA
• Poly resistor value vary, better than HPK
• Capacitance 80pF
• I dielectric

8
Bad Strips

• L1-001 1, 43, 140, 256, 276
• L1-002 95-109, 362, 383
• L1-003 275,384 Rpoly 4MOhm
• L1-004 32, 168, 263, 356, 373
• L1-005 180, 368
• L1-006 107, Rpoly 1.3 Mohm

9
Conclusion

• HPK
• Polysilicon resistors are out of specs
• ELMA
• Low breakdown voltage