Smart Dust, Micro Robots, and other MEMS Fantasies

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Smart Dust, Micro Robots, and other MEMS Fantasies

• K. Pister
• Berkeley Sensor Actuator Center
• Electrical Engineering Computer Sciences
• UCB

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What is MEMS?

• MEMS is Micro ElectroMechanical Systems
• Integrated circuit processing micromachining
• Sensors, Motors, Structures, Electronics
• ? Systems on a micron to centimeter scale

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MEMS Gyroscope Chip
Sense Circuit
Proof Mass
Rotation induces Coriolis acceleration
Electrostatic Drive Circuit
J. Seeger, X. Jiang, and B. Boser
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MEMS Gyroscope Chip
J. Seeger, X. Jiang, and B. Boser
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Digital Light Processor(Texas Instruments)
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Lots of exponentials

• Digital circuits
• Speed, memory
• Size, power, cost
• Communication circuits
• Range, data rate
• Size, power, cost
• MEMS Sensors
• Measurands, sensitivity
• Size, power, cost

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Moores Law, take 2

• Nanochips on a dime (Prof. Steve Smith, EECS)

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Smart Dust Goals

• Autonomous sensor node (mote) in 1 mm3
• Micro air vehicle delivery
• Thousands of motes
• Many interrogators
• Demonstrate useful/complex integration in 1 mm3

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COTS Dust

• GOALS
• Create a network of sensors
• Explore system design issues
• Provide a platform to test Dust components
• Use off the shelf components

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COTS Dust - RF Motes

• Simple computer
• Cordless phone radio
• Up to 2 year battery life

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Tiny OS (TOS)

• Jason Hill, Robert Szewczyk, Alec Woo, David
  Culler
• TinyOS
• Mote Active Messages
• CompGlue

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Tiny OS Programming(CompGlue)

• Program with CAD
• Structural VHDL
• Compile time resolution of event handlers
• TOS available on the web www.cs/jhill

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COTS Dust - Optical Motes

• CCR mote
• 4 corner cubes
• 40 hemisphere

• Laser mote
• 650nm laser pointer
• 2 day life full duty

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CCR Interogator
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Video Semaphore Decoding
Frame subtraction Minimum threshold, pixels Byte
parity and packet CRC Dozens of simultaneous
signals
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Video Semaphore Decoding
Diverged beam _at_ 5.2 km In shadow in evening sun
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Micro Mote - First Attempt
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Micro Mote - Second Attempt
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2D beam scanning
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Augmented Reality
Lau, Muller, Solgaard and students
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8mm3 laser scanner
Two 4-bit mechanical DACs control mirror scan
angles. 6 degrees azimuth, 3 elevation
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01 Goal
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Maxell (Hitachi) RF ID Chip
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Satellite Imagery
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(somewhat) Virtual Keyboard
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Power and Energy

• Sources
• Solar cells 0.1mW/mm2, 1J/day/mm2
• Combustion/Thermopiles
• Storage
• Batteries 1 J/mm3
• Capacitors 0.1 J/mm3
• Usage
• Digital control nJ/instruction
• Analog circuitry nJ/sample
• Communication nJ/bit

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Dust Delivery

• Silicon maple seeds, dandelions

1mm3
Solar power, Gossamer wings
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Combustion

• Solid rocket propellant
• 7 seconds thrust, Isp15s
• 1mJ out

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MAVs for Delivery
www.spyplanes.com

• 60 mph
• 18 min
• 1 mi comm

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Synthetic Insects(Smart Dust with Legs)

• Goal Make silicon walk.

• Autonomous
• Articulated
• Size 1-10 mm
• Speed 1mm/s

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Actuating the Legs
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Silicon Inchworm Motors
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Synthetic Insects
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Micro Flying Insect

• ONR MURI/ DARPA funded
• year 2 of 5 year project
• Dickinson, Fearing (PI), Liepmann, Majumdar,
  Pister, Sands, Sastry

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Conclusion

• Welcome
• to the Next Level

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Micro Flying Insect

• asdf

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Micro Flying Insect
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24 Bat
40 mph top speed 30 minute loiter autopilot
pressure sensor, gyros, XLs 2 planes, 1 ground
station, in 1 suitcase
Steve Morris (Spyplanes)
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Marine LOE 4
3 MAVs participated, 1 flew
7 sorties on station in minutes