Free Standing YBaCuO Uncooled IR Detectors

1
Self-Supporting Microbolometer Fabrication
a) Deposit Pattern Ti Mirror Spin-on pattern
polyimide mesa
b) Deposit Pattern Ti electrode arms and Au
contacts
Ti
Polyimide
Polyimide
Ti Mirror
Ti Mirror
d) After undercut, microbolometer is completed
c) Deposit pattern YBCO thermometer
YBCO
Ti
YBCO
Au
Ti
Polyimide
Ti Mirror
Ti Mirror
2
Y-Ba-Cu-O Self-Supporting Structures
? 400-nm thick YBCO ? 100-nm thick x 10 mm wide
Ti electrode arms ? 30-nm thick Au contacts ? 40
mm x 40 mm pixels
3
Resistance vs. Temperature Characteristics
4
I-V Characteristic
5
Typical Signal Spectra Ib 0.44 mA, Chopped
1470 K radiation filtered from 2.5 to 13 mm
6
Chopped 1470 K radiation filtered to 2.5 - 13 mm
7
(No Transcript)
8
Summary and Comments

• Y-Ba-Cu-O can be deposited easily by rf
  sputtering at ambient temperature. Processing is
  post-CMOS and micromachining compatible.
• Self-supporting structure provides low thermal
  mass, yet maintains relatively high absorption
  (30).
• Y-Ba-Cu-O has a relatively high TCR (3.5/K) and
  low 1/f-noise, attractive as a bolometer.