There's Plenty of Room at the Bottom !

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There's Plenty of Room at the Bottom !
By Richard Feynman , APS Annual Meeting, 29 Dec.
1959, at the California Institute of Technology
(Caltech). http//www.zyvex.com/nanotech/feynman.h
tml

• 1. .. Computing machines are very large. They
  fill rooms. Why cant we make them very small ?
  For instance the wires should be 10 or 100 atoms
  in diameter and the circuits should be a few
  thousand angstroms across.
• 2. The electron microscope is not good enough.
  It can only resolve 10Angstroms. I would like
  to try and impress upon you. The importance of
  improving the electron microscope by 100 times.
  It is not impossible. It is not against the laws
  of diffraction of the electron. So, it should be
  possible to see individual atoms
• 3. I am not afraid to consider the final
  question as to whether, ultimately, in the great
  future, we can arrange the atoms the way we want,
  the very atoms, all the way down !

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??? ??????? ???? First Digital computer
ENIAC, 1945
vacuum tube ????? ???????????
27,000Kg, 1800 vacuum tubes, 140kW
????? ???? ? ????? ??? ?? ???? ????? ????? !!
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First Bipolar transistor

Shockley, Bardeen and Brattain (1947)
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??? ?????????? (1954) ?? ?????????
 
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??? ????? ????? First Integrated Circuit
J.S. Kilby (TI) 1961
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????? ???????? Silicon wafer
300mm
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MOSFET
Gate
Drain
Source
polySi
oxide
p-Si
N
N
channel
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Todays MOSFET
CMOS
CPU
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Electron Beam Lithography and
PhotolithographyEBL and EUVL
Electron Beam, 200kV, 10nm, 50kHz
PMMA
SiO2
Silicon
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3-5nm lines obtained by Electron Beam Lithography
on PMMA
Vieu et al. Appl. Surf. Sci. 164,2000 (111)
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EUV Lithography
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EUV Lithography
l 13nm
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2005 MOSFET
Todays MOSFET
2014 CMOS
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Carbon Nanotubes
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????? ?????? ?? ?????? ??? ?????? ? ??????
?????? ??????? ???????????
Ijima1991
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?????? ???? ?????? ?????? ?????? ???????
http//www.lbl.gov/Science-Articles/Research-Revie
w/Magazine/2001/Fall/features/02Nanotubes.html
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Carbon Nanotubes
Metals if (n,n) and (n-m)3k
Semiconductors otherwise
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??????? ???????? ??????????????????
????????? ?? ???????
http//www.research.ibm.com/nanoscience/fet.html
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Carbon Nanotubes
K. Hirahara, K. Suenaga, S. Bandow, H. Kato, T.
Okazaki, H. Shinohara, and S. Iijima
Phys. Rev. Lett. 85, 5384 (2000)
http//www.snf.ch/NFP/NFP36/RFFranzoesisch.pdf
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Nanotube Field Effect transistor (2001)
http//www.research.ibm.com/nanoscience/fet.html
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?????? ?????
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Snail cells
Plastic pegs
http//www.nature.com/nsu/010830/010830-7.html1
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