Introduction to Device Simulation Performed by Silvaco TCAD

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Introduction to Device Simulation - Performed
by Silvaco TCAD -
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TCAD

• Technology Computer Aided Design
• Numeric simulation of processes and devices.
• Good for analyzing the internal aspects of the
  device.
• Good for failure analysis.

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TCAD Software

• Process Simulator ? Device Simulator
• ATHENA ? ATLAS
• SUPREM ? PISCES
• TSUPREM4 ? MEDICI
• DIOS ? DESSIS
• Others

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Process Simulator

• ATHENA?SUPREM?TSUPREM4?DIOS
• The process recipe ( i.e. time?temperature ) is
  used as the input to a process simulator, and a
  cross-sectional device structure is produced.
• The device structure is used as the input to a
  device simulator, and the electrical
  characteristics of the device are produced.

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Device Simulator

• ATLAS?PISCES?MEDICI?DESSIS
• Device simulation can be performed without
  process simulation, but the doping profile of the
  device will become a key question.
• Device simulation is more mature than process
  simulation because the physics of the device
  operation are better understood.

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Silvaco TCAD

• ATHENA ? ATLAS
• TonyPlot TCAD Visualization Tool
• DevEdit Device Builder and Meshing Tool
• DeckBuild Run-Time Environment

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ATHENA Simulation Result
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ATHENA Simulation Result
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ATLAS Simulation Result
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ATLAS Doping Simulation
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ATLAS Potential Simulation
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ATLAS Simulation Result