Magnetic Nanofluidics ME342 Design Project Update 3

1
Magnetic Nanofluidics ME342Design Project
Update 3

• Abhishek Dhanda
• Kwan-Kyu Park
• Michael Pihulic
• Katherine Tsai
• July 27, 2006

2
Equipment Training

• Completed
• Katherine STS2
• Abhishek Metallica
• Kwan-Kyu P-5000
• Pending
• WBGEN for gold liftoff
• Drytek 1 and 4
• Super Users
• J Provine

3
Process Update
4
Progress

• Masks
• Chrome Masks
• Berkeley staff on vacation
• Fabricated by Photo Sciences in Torrance, CA
• Sent in GDSII files 7/19
• Masks received 7/25, next day shipping
• Costs 380 / Mask
• E-beam
• Test runs starting Friday
• Layouts completed

5
Progress

• Materials
• Wafer Inventory
• 5 SOIs
• 18 Primes
• Tweezers
• Carriers

6
Progress

• Characterization
• STS2
• Characterize etch rate of poly-Si and Si
  (microchannels)
• 4 primes with polysilicon
• P5000
• Characterize etch rate of poly-Si (nanochannels)
• Metalica
• Characterize film thickness precision
• 1 prime
• Front side lithography
• 1 um SPR3612
• Exposure times approx 1.8 sec
• 8 primes, with Front Side Etch mask

7
Emergent Problems

• Equipment (past or present or future?) down
• STS1 --gt Solution STS at Berkeley
• Karl Suss
• Tylan1
• Dektak (gold contaminated)
• Fluorescence microscope in Kovacs labs
• Depending on strength of our signal may need
  filters to improve selectivity
• Filters cost a lot (1000 each)
• Access to Prof. Santiagos micro-PIV setup?

8
Emergent Solutions

• Mask issues at both SNF and BSAC resolved by
  using Photo Sciences
• Metal tweezers in stock!
• How will we do litho on pyrex wafer?
• Unable to selectively etch
• Anodically bond devices individually

9
Future Work

• Current week
• Characterizing P-5000 for polysilicon etch
• Characterizing Metallica for gold sputtering
• Oxide etch with P-5000 for backside etch using
  STS in Berkeley.
• Send in 2nd mask set (where?)
• Ebeam patterning
• Next week
• Finish microchannels device fabrication
• Begin testing

10
Lessons Learned

• Put photoresist on the correct side.
• Nighttime is good time for processing.
  (Midnight5AM)