Title: Thermal Sensing and Actuation Part 2
1Thermal Sensing and ActuationPart 2
- EE485A Lecture
- October 8, 2008
2Thermal Expansion
- Volumetric expansion coefficient (TCE), a, the
ratio between the relative change in volume and
the temperature variation (ppm/K)
- Linear expansion coefficient the change of only
one dimension of an object due to temperature
variation,
- The volumetric and linear expansion coefficients
are related by
3Thermal Bimetallic Effect
t1
t2
w1
w2
L
For a1 The radius of curvature of the arc is given by
The angle (in radians) associated with an arc of
length L and radius r is given by
4Thermal Bimetallic Effect, cont.
- Once the radius of curvature is found, the
vertical displacement is found from
q
r
r cos(q)
d r - r cos(q)
5Exercise
- Calculate the radius of curvature and
displacement for a bimorph cantilever made up of
aluminum and silicon nitride heated to 20 C
above room temperature. The width of both layers
is 20 mm and the length is 100 mm. The silicon
nitride is 1 mm thick and the aluminum is 0.5 mm
thick. E 250 GPa for silicon nitride and 70
GPa for aluminum. The thermal expansion
coefficients of aluminum and silicon nitride are
a2 25 ppm/C and a1 3 ppm/C, respectively.
6Exercise continued
- Now allow the silicon nitride to extend for an
additional 100 mm beyond the aluminum. Determine
the total deflection at the tip of the cantilever.
7Sample Application
Cilia array for micromanipulation, Bohringer,
Donald, Kovacs, Suh (U. Washington) Uses layers
of Polyimide engineered for different
CTEs Fingers curl up 120 mm out of
plane Thermal actuation used to flatten cilia,
electrostatic power used to hold cilia flat.
8Actuators with a Single Material
- Using geometry to cause differential heating
Luo, Flewitt and Milne, University of Cambridge
Hot arm
Cool arm
http//john.maloney.org/thermal_actuation.htm
9Thermal Couples
- Two wires of dissimilar materials joined at a
single point. - Work function difference results in
temperature-sensitive voltage difference - Voltage change for temperature change given as
Seebeck coefficient. - as DV/DT (specific to material combination)
- Several types (E, J, K, T, R, S) in common use,
see p. 172. - Thermal pile
- multiple thermal couples connected end to end
with hot and cold junctions aligned - More sensitive than single thermal couple
- Micromachined thermal couples have been made
using Ni and W with a sensitivity of 22 mV/K
10Thermal Resistors
- Electrical resistors where the resistance depends
on temperature - aR temperature coefficient of resistance (TCR)
- Quick exercise A thermal resistor is 2 kW at
room temperature and has a TCR of 100 ppm/C.
Predict the resistance at 50 C above room
temperature.
11Characterizing Thermal Resistors
- Self-heating the current and voltage used to
interrogate the resistor value can heat the
resistor up.
I
R
TCR
Ohms Law
TCR 0
TCR 0
TCR
V
P
12Application Examples
- Accelerometer using differential heat loss under
acceleration (see Case 5.4) - Hot-wire anemometer (see Case 5.6) as flow
increases, heat transfer from the wire increases.
By monitoring the amount of power required to
keep the wire at constant temperature one can
measure flow rate. - Infrared sensor using bimetallic structure coated
with material the absorbs IR light (see Case 5.8) - Cantilevers for data storage and retrieval (see
Case 5.9)