COLUMBIA CEPSR Clean Room Orientation

1
COLUMBIA CEPSRClean RoomOrientation
March 2003
2
Clean Room Operations
STAFFING Professor James Yardley Director
NSEC 4-3839 Professor Horst Stormer
Scientific Advisor x4-3389 Richard Harniman
Lab Manager x4-9831 Eric Holihan Laboratory
Assistant Mgr. x4-0260 Erik Henriksen
Technical Assistant LAB HOURS Facility
is open 24hrs/day 7 days/week Must have
Columbia ID and swipe card access to use Clean
Room and associated equipment 10th Floor CEPSR
Rm 10LW6 Core hours are 8AM 5 PM daily
Monday - Friday Buddy system in force on
weekends and after core hours LAB ACCESS
QUALIFICATION Graduate Columbia students are
given security access after being trained by
Lab Manager or Clean Room staff Undergraduate
students with support of Graduate Student
and/or Professor must be properly trained and
gain access control from Lab Manager
Outside industry or other university researchers
with SPECIAL PERMISSION (Tours and visits
must be scheduled through Lab Manager)
3
Steps To Use Clean Room
1. ATTEND ORIENTATION Meeting with Lab Manager or
Assistant 2. STUDY LAB USEAGE GUIDE (NSEC website
online) 3. OBTAIN Security Swipe Card Access from
Lab Manager or Assistant (information given
to Clean Room staff in their office and
entered into computer database) 4. SCHEDULE
MANDATORY INTRODUCTORY training sessions on
all equipment you need for your work with Clean
Room staff 5. OBTAIN Authorization and
Certification to operate equipment without
supervision
4
Clean Room Description
8000 sq ft class 10000 500 sq ft class 1000
clean room Temperature and humidity controlled
environment Yellow room lithography area
Entry by way of dedicated gowning room Access
with Columbia ID badged swipe card entry Wafer
pieces, 1 inch and 2 inch substrate processing
Some equipment is dedicated for certain processes
or substrates Observe all signs Segregated
hazardous chemical storage area Specialized
utilities throughout lab including high purity
de-ionized water, high purity gases, equipment
cooling water, exhaust ducting, etc. Remote
toxic gas cabinets with 24 hour-hazardous gas
detection 3 fume hoods for working safely with
chemicals
5
Clean Room Capabilities
PROCESSES SUPPORTED IN CLEANROOM Wet
cleaning solvent strip 2 Photoresist
Spinners with full programmability and ramp
control Resist baking (Hot plates) Optical
Microscope inspection, bright, dark field
Nomarski with digital video capture
WestBond 7476 Wire Bonder for Al bonding
Kulicke Soffa 4123 Wire Bonder for Au bonding
1 Karl Suss MJB3 UV200 standard contact aligner
(200Watt UV lamp), up to 2 inch wafers -
365nm and 405 nm top side alignment only 1
Karl Suss MJB3 UV400 contact aligner (350 Watt
lamp), up to 2 inch wafers - 365nm and 405 nm
- with top and bottom side IR alignment Wet
Develop wet etching 1 Rapier 2 Target
Sputtering System with RF Etch capability and
film thickness monitoring 1 SEMICORE
Electron beam evaporators 6 socket crucible
1 Dektak 3 Stylus Profilometer 1 Rudolph EL
III Automatic single-angle ellipsometer (fixed
wavelength) 2 BOC/Edwards 306 Thermal
Evaporators
6
Clean Room Capabilities
PROCESSES SUPPORTED IN CLEAN ROOM
Hitachi S4500, Cold Field Emission SEM
(Inspection) AG Associates 410 Rapid Thermal
Annealer (Si/III-V RTA) Dry Etch Oxford 80
Plus RIE (Chlorine, Boron Trichloride, Oxygen
etching) Oxygen Plasma Asher (Technics Series
800 O2, CF4O2) Karl Suss Wafer Scriber
STS 310 PECVD, silicon nitride and amorphous
silicon CAIBE chemically assisted ion beam
etcher system Micromanipulator with Keithley
4200 Semiconductor Characterization System and
Keithley 590 Capacitance Voltage Analyzer
7
Clean Room Capabilities
EQUIPMENT COMING SOON

• UV/Ozone Plasma cleaner
• Inductively Coupled Plasma/Reactive Ion Etcher
• Oxidizing Tube Oven

8
Clean Room Procedures
SUPPLIES Users supply their own substrates
and metallization materials (except for
Chromium (chrome logs supplied for Thermal
Evaporators as are Tungsten boats)
Cleanroom supplies glassware, beakers, texwipes
and other necessary materials for the Yellow
Room Gowns, safety equipment, etc. supplied
by Clean Room Cleanroom supplies acetone,
alcohols, BOE, HF, HMDS, AZ5214E resist, AZ
300 MIF Developer, AZ 400K developer, Sulfuric
Acid, Hydrogen Peroxide, HBr, AZ Developer,
NH4OH, HCl GOWNING Disposal knee length
gowns, vinyl and nitrile gloves masks optional
Individual labeled plastic bins outside
cleanroom available for gown storage
Shelves inside cleanroom for storage (must be
labeled). BRINGING MATERIALS INTO LAB NO
pencils, wood, cardboard or dirty/dusty material
should be brought into Lab ballpoint pens,
writing paper OK. See lab management for
specific cases
9
Clean Room Procedures
WASTE DISPOSAL Dispose of ALL chemicals
including solvents HF waste into prelabeled
coontainers and store in appropriate disposal
area 1 disposal locations (in yellow room 1st
hood) Vaporous waste is stored in labeled
container do not close lids tightly
EQUIPMENT ACCESS Approval/training required
for all equipment Training and supervision
usually done by superuser Training sign up by
down loading training form, notify
laboratory manager Badge log-in required for
single door entry Log books must be used for
major pieces of equipment Read and obey ALL
signs Report all broken or "sick" equipment to
lab management Volunteer to help in the lab
and be a superuser WHEN IN DOUBT, ASK
10
Clean Room Procedures
SAFETY Yellow Room fume hoods, some acid
usage requires special training Know location
of fire extinguishers, first aid, spill kits and
emergency exits Read MSDS sheet on any
chemical you are unfamiliar with (Notebook of
MSDS sheets in wall cabinet) Verify fume hood
exhaust before using hoods Wear proper safety
equipment Visor, safety gloves and aprons at wet
stations when using acids wear safety
glasses at all times in Yellow Room Be
especially wary of Hydrofluoric Acid (HF) and HF
mixtures (eg BOE) These are weak acids which
may not be felt immediately upon contact but
the fluorine can work its way to your bone and do
serious damage. Wash exposed area with large
amounts of water for at least 15 min and
notify lab management. Use special calcium
gluconate cream (located in top drawer of
lab bench). Store all chemicals in their
proper cabinets and label all chemicals Label
any beakers left out with their contents, your
name and date There must be 2 people in Yellow
Room after normal core hours, nights and
weekends (Buddy System) Read and understand
Lab Usage Guide (Download from website) Do not
touch equipment you are not trained on- WHEN IN
DOUBT, ASK
11
Lab Etiquette
Clean up after yourself Leave room for
others at fume hoods Do NOT borrow other users
equipment or material without their
permission Label unattended setup with your
name, chemicals in beaker, phone , time and
date started, time and date you will finish
Read and obey ALL signs Get to know your
fellow researchers outside your group
Volunteer to help in the lab and be a superuser
Put things back when you are done Use phones
only for emergencies Report broken equipment,
safety issues etc. Turn off DI water when
finished
12
Clean Room Layout
CVD Computer
Gas Cabinet
PECVD
STS PC310 PECVD System
Main Service chase
Electrical Closet
Gas Cabinet
Ozone Stripper
Service chase

RTA
CAIBE
Technics 800 O2 Plasma Asher
AJA Sputter Unit
Edwards 306
Edwards 306
WestBond Wire Bonder
Oxford 80 Plus PlasmaLab RIE
Keithley
SEMICORE E beam Evaporator
Wafer Scriber
Probe Station
Bay 4
Gas Cylinders
Bay 3
Large Delivery Entrance
Keithley 590
Bay 2
Water Chiller
Bay 1
Installed Equipment
Bay 5
Chemical Hood Wet Bench
Chemical Hood Wet Bench
Resist Spin Coater
Future Equipment Installations
Rudolph EL III Ellipsometer
Equipment Installations in Progress
Gowning
Wire Bonder
Service chase
MJB3 Mask Aligner
Resist Spin Coater
MJB3 Mask Aligner
Dektak 3 Profilometer
Optical Microscope
SEM
Entrance
Service chase
Emergency shower/eyewash
West Stairs - Fire Exit