National Institute for R

1
National Institute for RD in Microtechnologies
IMT- Bucharest (www.imt.ro) Dan Dascalu CEO
and President of the Board
East/West partnering workshop within the
MINAEAST-NET initiative , Berlin, April 22, 2005
2

• IMT-Bucharest is a non-budgetary research unit
  supervised by the Ministry of Education and
  Research
• Set up in 1993 (by a decision of the Romanian
  Government).
• In 1996 became a National Institute (merging
  with the former ICCE, working in semiconductor
  electronics)
• In 2004 IMT was proposed to change its name in
  National Institute for RD in Micro- and
  Nanotechnologies)

• M I S S I O N
• Scientific research and technological
  development in micro- and nanotechnologies,
  contribution to the development of the strategy
  of the domain, major effort in the national
  program for scientific research and technological
  development.
• Providing services (technological services,
  consulting, design, training, technology
  transfer) for both academic research and
  industrial units and thus fostering innovation
  and technology transfer.

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT
IN MICROTECHNOLOGIES ( IMT-Bucharest )
ACTIVITIES

• RTD and services focused on micro and
  nanotechnologies, priority areas 2 (IST) and 3
  (NMP) in FP6, for MEMS, MOEMS and BioMEMS. In
  2001-2005 IMT acted as a hub of networks on
  micro- and nanotechnologies, at National level,
  founded by the National RTD Programme for New
  materials, micro- and nanotechnologies
  (MATNANTECH).
• IMT founded the Centre for Technology Transfer
  in Microengineering (CTT-Baneasa), and is a
  partner in the Scientific and technological park
  in Micro and Nanotechonologies, the sole park
  with this profile in Romania.
• The institute is part of the MST-Design
  consortium (2003-2005), providing services in
  microsystems, within EUROPRACTICE.
• Within the support projects MINAEAST-NET
  (2004-2006) and MINOS-EURONET (2005-2008), IMT is
  coordinating activities of networking in micro-
  and nanotechnologies, at the European level.

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT
IN MICROTECHNOLOGIES ( IMT-Bucharest )

• IMT research laboratories
• Nanotechnology
• Microsystems for Bio-medical and Environmental
  applications
• Micro-and Nanophotonics
• RF-MEMS and Micromachined Microwave Components
• Simulation, Modelling and Computer Aided Design
• Microphysical Characterization
• Reliability

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of nanotechnology (1)

• Head of the laboratory of Nanotechnology
• Dr. Irina Kleps (irinak_at_imt.ro)
• Recognized at national level, and funded between
  2001 and 2004, as a Centre of Excellence in
  Nanotechnology
• Acting under the aegis of the Romanian Academy of
  Sciences
• Mission Nanomaterials and nanostructures
  theoretical studies and experimental procedures.
• Main areas of expertise
• silicon nanoelectrode arrays, porous silicon
  layers (El, PL and bio-active properties)
• field emission nanostructures
• magnetic nanostructures and microsensors
  (modelling, computer simulation and design)
• biomedical applications of nanostructures drug
  delivery systems, microchips for DNA analyses,
  bio-chips for diagnosing biological media and for
  pollution control
• development of new materials selective growth of
  CNT on silicon microetched support silicon
  carbide and diamond like carbon (DLC) thin
  layers, nanostructured silicon, nanostructured
  aluminium nitride (AlN) and PZT thin layers
  low-frequency noise in nanostructured materials.

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of nanotechnology (2)

• European Projects
• FP6 NANOFUNPOLY, Nano2Life
• National Networks
• NANOMATFAB (Nanotechnology research center for
  new materials and fabrication processes),
• CENOBITE (Nanobiotechnologies research center),
  BIONANONET (Bionanoitechnology Network).
• Specific Instruments and Equipment Available
  computers for simulation instruments for
  electrical characterisation of nanostructures
  equipment for electrochemical processes Trace
  lab. Combine Keithley model 6487-picoammeter/volt
  age source- 2004 silicon etching power supply.
• Publications
• More than 90 published papers and scientific
  communications (2000-2004) (Physica Status
  Solidi (a), NATO Science Series, Material Science
  in Semiconductor Processing, Solid State Commun.,
  Journal of Nanoparticle Research, Journal of
  Physics D Applied Physics, Microelectronic
  Engineering, Materials Science and Engineering,
  J. Appl. Phys., Rev. Adv. Mater. Sci. Sensors
  and Actuators A)
• Two chapters in "The Encyclopaedia of Nanoscience
  and Nanotechnology", H. S. Nalwa, (Ed.), American
  Scientific Publishers, March 2004 Irina Kleps -
  "Electrochemical nanoelectrodes" Mihai Mihaila
  "Low-Frequency Noise in Nanomaterials and
  Nanostructures"
• Three Romanian patents (2000-2004)

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of nanotechnology - results
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Nanotechnology -results

• Porous silicon (PS) for drug delivery
  applications
• (Cooperation with NMRC Irelands ICT Research
  Centre)

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Nanotechnology-results

• Miniaturised electrochemical cell with
  nanoelectrode arrays
• (Cooperation with IMM Mainz Germany)

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Nanotechnology-results

• Selective growth of carbon nanotubes on silicon
  network nanoelectrodes
• (Cooperation with Institut de Physique et Chimie
  des Matériaux - Strasbourg, France)

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications

• Head of the lab dr. Carmen Moldovan (email
  cmoldovan_at_imt.ro)
• Mission
• Scientific research and technological development
  activity in the field of chemoresistive sensors,
  resonant sensors, accelerometers, microarrays,
  ISFET sensors, pressure sensors, radiation
  detectors, biosensors and microsystems for
  environment monitoring and biomedical
  applications
• Education in the field of micro chemo and
  biosensors in cooperation with Politehnica
  University (courses and laboratories for
  students, training by research for PhD students).
• Expertise in
• Microsystems research simulation, design,
  technology, testing for mecano, chemo and
  biosensors pressure sensors, concentration
  vapour sensors, biosensors, test structures for
  surface micromachining, electrodes for biological
  sensors, microprobe for recording of electrical
  activity of cells, acceleration transducers,
  radiation detectors, MCM (Multi Chip Module)
• Technological development Wet and
  Electrochemical Anisotropic Etching, Bonding,
  Double side alignment, Thin layers deposition,
  Immobilization technique of enzyme on electrodes,
  Spin deposition of thin film sensitive polymers,
  bulk and surface micromachining, polymeric
  sensitive layers for chemical and biological
  sensors.

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications

• Instruments and Equipment Available
• computers for simulation and electrical
  characterization equipments. We also have
• access to the silicon technology facilities
  Masks fabrication SEM, AFM, spectroscopy,
  ellipsometry, optical microscopy.
• PROJECTS
• National projects The team is running starting
  with 2000 a number of 19 national projects as
  coordinator and more of 20 projects as partner.
  
• European Projects
• FP5 REASON, Europractice - MST Design, NOSE
• FP6 4M, PATENT, Nano2Life, MI-lab-on chip
• National Networks
• NANOMATFAB (Nanotechnology research center for
  new materials and fabrication processes),
• CENOBITE (Nanobiotechnologies research center),
  BIONANONET (Bionanoitechnology Network).
• PUBLICATIONS
• The members of the team are authors (in the last
  five years) of 5 patent, 22 articles, 82 papers
  in Proceedings, 2 books/chapter in book

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
GAS SENSORS
Resonant gas sensors
Features The integration on the same chip of
the microresonator and electronic circuits High
resolution and sensitivity Low power
consumption Applications in CO detection by
covering the bridge with polyaniline Principle
The sense and the drive electrodes and
polysilicon microbridge form together variable
capacitors the capacity changes induced by gap
variations are used to detect the bridge
mechanical oscillations. To process the output
signal of the resonant sensor, a CMOS detection
circuit is used.
Chemoresistive Microsensors for CO detection
with polymeric sensitive layers
SEM picture of the encapsulated sensor with the
released microbridge in oscillation
Principle The change in conductivity due to the
chemisorption of gas molecules at the sensitive
layer surface, deposited on top of the electrodes
.
Optical photography of the sensor chip
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
Field effect gas sensors for pH, K, Na, Mg 2,
Ca2 Field effect gas sensors are based on
metal-insulator-semiconductor structures used to
detect chemical quantities. Examples are
biological and medical applications. The surface
field effect is a desirable mechanism for a
generating potential that provides high chemical
selectivity and sensitivity.
Simulation and Layout of a FET sensor on the
tip of a microprobe
Microprobe for recording/stimulation of the
electrical activity of cells and tissues
The extracellular potential recording (through 8
channels displayed on the tip of the microprobe)
permits the investigation of the central nervous
activity Stimulating probes for many prosthetic
applications should be able to deliver constant
current pulses into the tissue through multiple
sites precisely spaced on a substrate
Microprobe photo optical
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
CALORIMETRIC SENSORS
Calorimetric sensor detects the heat that is a
result of a burning reaction. The reaction takes
place inside the ceramic pellet impregnated with
the catalyst (heated at 300-500oC) and involves
oxygen and a flammable gas. The resulting heat is
detected as an imbalance of the bridge in which
the sensor is connected
Figure 14. Z-axis Displacement at 10.5 Volts
(also showing deformation)
Figure 13. Thermal distribution at 10.5 Volts
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
METALLIC OXIDES GAS SENSORS on alumina substrate
Design aspects The gas sensor was designed to
have an uniform temperature distribution. The
rounded shape of the heating resistor gives an
uniform temperature distribution, with the
maximum temperature in the center of the circle.
Temperature distribution for the heater at 8V
Full layout
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
CHEMORESISTIVE SENSORS PHTALOCYANINE BASED for
NOx detection
Resistance versus NO2 concentration for NiPc
Resistance versus NO2 concentration for FePc
SEM picture of the encapsulated sensor chip
Resistance versus NO2 concentration for CuPc
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
PRESSURE SENSOR WITH CAPACITIVE READOUT
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
Electronic Nose - Simulation and Design of
Resonant Microstructures
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems for Biomedical and
Environmental Applications - results
Micro channels and micro holes for cells
investigation

• Results
• 1million holes on 2mm2
• masking layer
• Etching process for glass

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Micro and Nanophotonics Laboratory

• Head of lab dr. Dana Cristea (danac_at_imt.ro)
• Recognized at national level, and funded between
  2001 and 2004, as a Centre of Excellence in Micro
  and nanophotonics

• Expertize in
• in advanced micro-photonic devices and MOEMS
  (design, modeling and manufacturing, development
  of new design tools, new mixed technologies and
  advanced materials for micro and nano- photonic
  structures)
• optoelectronic devices and integrated circuits
  research and development

• Research activity in the field of microphotonics
  and optical MEMS
• ? Development of new materials, processes,
  micro- and nano-scale photonic structures
• ? Development of optoelectronic integrated
  circuits (OEIC)
• ? Development of materials, technologies and
  components for optical MEMS

Specific facilities Software time-domain
simulation software for advanced passive and
active photonics components- OptiFDTD-cad,
semiconductor heterostructure modeling software -
HS_Design spectrophotometer experimental
set-up for optoelectric characterization in
UV-VIS-IR spectral range of optoelectronic and
photonic circuits
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Micro and Nanophotonics Laboratory - results

• Photonic circuits for optical optical
  interconnects and sensors
• design, modelling and manufacturing of high gain
  photodetectors optimized for optical coupling
  with waveguides

Opto-FET with original structure optimized for
optical coupling with waveguides
Chemo-optical sensor
Waveguides obtained using anisotropic etching of
lt111gt-oriented Si
Waveguides obtained using sol-gel-technique
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Micro and Nanophotonics Laboratory - results
Micromechanical structures for MOEMS
movable micromirrors obtained using surface
micromachnining or front-end micromachninig
ELECTRO-MECANICAL SIMULATION

• Diaphragms displacement produced by an
  actuation voltage
• (?50 displacement exaggeration)

Au/SiO2 diaphragm applied voltage 6 V
0.51?m thick polysilicon diaphragm applied
voltage 2.5 V
0.732?m thick polysilicon diaphragm applied
voltage 4.5 V
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Diffractive optical elements (DOEs)
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of RF-MEMS and Micromachined Microwave
Components

• Head of the laboratory Dr. Alexandru Muller
• Recognized at national level as a Centre of
  Excellence in RF MEMS and it is financed by the
  National Programme "MATNANTECH" (2002-2006)
• Main topics
• Research and development of micromachined
  microwave devices and circuits (RF MEMS)
• Design, modelling and manufacturing of dielectric
  membrane supported inductors, capacitors, filters
  and antennae based on silicon and GaAs
  micromachining.
• Design, modelling and manufacturing of
  micromachined millimetre and sub millimetre wave
  receiver modules based on silicon as well as on
  GaAs technology
• Electromagnetical modelling of RF switches
• Specific facilities
• Computers and software (IE3D and Fidelity from
  ZELAND and COVENTOR software packages) for
  simulation and design
• Access to the technology laboratory and mask
  manufacturing facilities
• Access (by international cooperation) to
  millimetre wave on wafer measurements

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Microsystems and Micromachined
Microwave Components - results
38 GHz and 77 GHz Stub Type Filter Structures
Supported on GaAs Membranes Manufactured in
colaboration with FORTH Heraklion
SEM photo of 77 GHz cascaded open end series
stubs CPW filter
Millimeter Wave Filters for 38 and 77 GHz
obtained by micromachining of GaAs Dimensions of
the membrane are 2mm x 6 mm
WLI analysis developed at Angstrom labs. Uppsala
University
Double folded open end series stub band pass
filter structure for 38 GHz
4 M Meeting, October 6-7, Munich
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of RF-MEMS and Micromachined Microwave
Components - results
38GHz Monolithic Receiving Module on GaAs
Membrane Manufactured in colaboration with FORTH
Heraklion
Membrane supported integrated 38 GHz GaAs
micromachined receiving module (the antenna as
well as the Schottky diode are supported on a
2.2µm thin GaAs membrane). The membrane is
transparent in the white areas, which are
unmetalized.
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of RF-MEMS and Micromachined Microwave
Components - results
38GHz Monolithic Receiving Module on GaAs
Membrane Manufactured in colaboration with FORTH
Heraklion
Details of the Schottky diode region
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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MEMS Simulations - results

• Simulation of the stiction effect in the
  metal-to-metal resistive contact occurring in
  MEMS switches
• Fault Modelling and System Simulation of
  Flow-FETs"

AFM acquired image of contacting surfaces
The simulation of mechanical metal-to-metal
contact of rough surfaces (simulation using ANSYS
software tools)
Simulated Von Mises stress occuring in surfaces
contact
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
30
MEMS Simulations - results

• Tunable Fabry-Perot interferometers
• Co-operation with Photonics Group of CNRS - LAAS
  Toulouse

Simulation IMT - Bucharest, using CoventorWare
2004 software
Simulated displacement map on the movable mirror
of the device
Optical microscope image of an integrated
Fabry-Perot device , manufactured using surface
micromachining processes
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Microfluidic Simulations
Laboratory of Simulation - results

• Microfluidics and electro-thermal simulations for
  PCR silicon chip with 4 chambers

Temperature distribution map
A new FP6 project (STREP) Lab-on-a-chip
implementation of production processes for new
Molecular Imaging Agents - MI-lab-on-chip
Mask design
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Characterization - results
ATOMIC FORCE MICROSCOPY Micro and nanoscale
high resolution surface investigations,
including -2D and 3D visualization of surface
morphology, -direct quantitative measurements
in all of three dimensions by the line profiling
tool, statistical analysis (roughness, fractal
analysis). Compatible with near any type of solid
sample, ambient air operation, does not require
sample preparation .
AFM image of propil amino trimercaptosilan/Au, use
d as cells substrate Scan size 10 ?m ? 10 ?m
AFM image of a colagen film/Si, used as cells
substrate Scan size 5 ?m ? 5 ?m
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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Laboratory of Characterization - results
SEM - HIGH RESOLUTION TOOL FOR SURFACE
INVESTIGATION Performance Specification
Resolution 150 Å secondary electron mode 100 Å
attainable Magnification 20 - 100.000X range at
12 mm working distance. 5X standard at 50 mm
working distance. Signal outputs secondary
electrons, primary back-scattered electrons,
cathodoluminiscence
SEM photomicrograph of inverted pyramid pattern
obtained by anisotropic etching an (100)-oriented
silicon wafer
SEM photomicrograph of deep vertical-wall
grooves anisotropically-etched in an
(110)-oriented silicon wafer
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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2004 a turning point
IMT Participant to a significant number of
research projects in FP6 Playing an outstanding
role in networking at the regional scale, in
micro- and nanotechnologies However, the most
important point clear orientation for TTI
(technology transfer and innovation) Centre for
Technology Transfer in Microengineering
(CTT-Baneasa) Scientific and Technological Park
in Micro and Nanotechnologies (MINATECH-RO)
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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• Long-lasting cooperation between PUB, IMT and
  ROMES S.A.
• sharing resources
• common projects

Politehnica University
of Bucharest (PUB)

IMT

ROMES S.A.
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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TECHNOLOGICAL TRANSFER PORTFOLIO (I)
PIN PHOTODETECTORS MICROMATRIX MANUFACTURING
TECHNOLOGY FOR OPTICAL FIBER COMMUNICATIONS
APPLICATIONS
INTEGRATED MAGNETIC SENSOR TECHNOLAGICAL PROCESS
FOR ACCURATE MAGNETIC FIELD MEASUREMENT

• Results
• Modelling
• Computer simulation
• Design describing
• Manufacturing of magnetic
• microsensors on new principles.

• Results
• A matrix containing microphotodetectors with
  design lay-outs adapted to various optical
  cable/fiber geometries
• The new technology performances proved by a
  functional prototype

INTEGRATED GAS SENSOR, MADE BY SURFACE
MICROMACHINING CMOS COMPATIBLE
DEVELOPMENT OF TECHNOLOGIES FOR OPTICAL SENSORS
WITH APPLICATION IN INDUSTRIAL PROCESSES AND
ENVIRONMENT

• Results
• Electro-mechanical and chemical simulation and
  designing
• silicon structures as gas sensor
• Studying and implementing in Romania the surface
  
• micromachining techniques
• Manufacturing and characterization of an
  experimental model of
• the gas sensor, in order to verify the design and
  technology rules
• Increasing the Romanian microsystems technologies
  
• competitivity by assimilating
• new processes, developing the sensors and
  microsystems domain,
• in order to make it compatible with the european
  market demands

• Results
• Technology for integrated optical microsensors
• Technology for matrix optical sensors compatible
  with CMOS processes and integrated optical

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
37
TECHNOLOGICAL TRANSFER PORTFOLIO (II)
MICROPELLISTORS ARRAY FOR COMBUSTIVE GAS DETECTION
Integrated aray of micropellistors for combustive
gas detection usable in low voltage portable
equipments
MULTIPLE UTILITY MICROTRADUCTORS ON PIEZOELECTRIC
SUBSTRATE MANUFACTURING TECHNOLOGY FOR CROPS
PRODUCTS QUALITY TESTING AND MONITORING switch
microtraductors realized on piezoelectric
substrate for humidity, temperature and gas
detection for crops production storage silos
safety monitoring in small farms
MICROCELLS ON A BOROSILICATED GLASS LAYER
OBTAINED BY WET ETCHING METHOD microcells matrix
realisation on borosilicate substrata for
pharmaceuticals and medicine applications SILVER
MEDAL at EUREKA 2004, Bruxelles
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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A centre for technological transfer (CTT) in the
park

• A key feature IMT provides a technological
  pole, with resources used in research, education
  and innovation
• CTT will work closely with the MINATECH RO park,
  centred on IMT and ROMES S.A. facilities
• This park will be a platform of interaction
  between research groups and companies

East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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CTT-Baneasa Technology transfer in MNT
ROMES S.A.
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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IMT Bucharest Atomic Force Microscopy
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
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IMT Bucharest
Vacuum deposition
Furnance
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005
42
IMT Bucharest
CONTROL BENCH
CHEMICAL BENCH
East/West partnering workshop within the
MINAEAST-NET initiative, Berlin, April 22, 2005