PhD Wim Deferme

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PhDWim Deferme

• 07-11-2006

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Contents

• H2/O2-termination
• PIXE
• FIB
• Chlorination
• New holder
• NCD
• FTIR Berlin
• XPS
• Hall
• Perspective
• Perspective

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ERDA
ERDA Elastic Recoil detection analysis
Perfect to detect light elements like hydrogen.
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ERDA
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ERDA

• more H in bulk (or interlayer) with higher
  O-incorporation
• Thickness of surface layer ???

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RBS
RBS Rutherford Backscattering To check all
elements in the surface layer.
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RBS

• No difference can be seen between 0 and 1
  O-incorporation
• Problems
• No email-contact with Prof. Perina
• Promised to do PIXE, samples still in Prague.

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FIB KFM Berlin

• H2/O2-terminated diamond samples (0, 1 and 4)
• Make checkerboard pattern on diamond with FIB
  (focused ion beam)
• Check potential difference with KFM (Kelvin
  Force Microscopy) in Berlin

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FIB Antwerp
0 H2/O2 2 minuten
1 H2/O2 5 minuten
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Contents

• H2/O2-termination
• PIXE
• FIB
• Chlorination
• New holder
• NCD
• FTIR Berlin
• Hall
• Perspective
• Perspective

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New Holder

• incorporation of other species (Si, Mb,)
• etching of holder, pump,.

New holder (Borosilicate)
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NCD-termination

• Procedure
• Hydrogenation (3000W, 60Torr, 1000sccm H2)
• Chlorination (150W,20 Torr, 30min)
• Different mixture ( 300 sccm in total sccm
  Ar-H2-HCl)
• Sample A 250 sccm Ar, 25 sccm H2, 60 sccm HCl
• Sample B 250 sccm Ar, 60 sccm HCl
• Sample C 250 sccm Ar, 25 sccm H2, 40 sccm HCl

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FTIR (Berlin)

• Samples B and F hydrogenated
• Other samples treated in HCl plasma
• Detector DTGS, 3kHz, 4cm-1, 3.5mm aperture,
  angle 570

• No difference between samples B, F (no Cl) and
  the other samples
• Band at 480 cm-1 belongs to Si-O-Si rocking
  vibration
• Band at 530 cm-1 belongs to Si-O-Si symmetric
  stretch of interstitial oxygen

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FTIR (Berlin)

• SiO2 band between 1100 and 1300 (sample A and C)
• Si-C TO and LO modes (transverse optical and
  longitudinal optical) at 790 cm-1 and 970 cm-1
  (F, B and D)

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FTIR (Berlin)

• CH2 symmetric (2846 cm-1) and assymmetric (2920
  cm-1) stretching vibrations are weaker for
  samples C and D
• Evidence of C-Cl bond ??

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XPS (Namur)
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XPS (Namur)
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XPS (Namur)
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Conclusion

• Ellipsometry C-H bond less intens ? H desorbed
  from surface??
• XPS Cl on surface but small amount

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Contents

• H2/O2-termination
• PIXE
• FIB
• Chlorination
• New holder
• NCD
• FTIR Berlin
• Hall
• Perspective
• Perspective

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Perspective

• H2/O2-termination
• KFM Berlin
• Hall measurements
• Article covering all results on H2/O2-termination
• Chlorination
• Influence of time on the termination
• Hall measurements
• XPS
• Ellipsometry