Leak tests - PowerPoint PPT Presentation

1 / 11
About This Presentation
Title:

Leak tests

Description:

AFS 1400 Bidirectional Mass Flow Meter. Characteristics of AFS 1400: ... Flow. meter. opened. F1: 1.023e-6 l/s. F2: -1.621e-7 l/s. F3: -1.391e-7 l/s. F4: 1. ... – PowerPoint PPT presentation

Number of Views:71
Avg rating:3.0/5.0
Slides: 12
Provided by: peterv7
Category:
Tags: flowmeter | leak | tests

less

Transcript and Presenter's Notes

Title: Leak tests


1
Leak tests
G. Apeldoorn, P. Vankov 29.01.2004, NIKHEF
2
Leak tests

29.01.2004
Tests are based on using AFS 1400
Bidirectional Mass Flow Meter
(http//www.sensirion.com)
  • Characteristics of AFS 1400
  • - dynamic range 0.03 400 sccm
  • Fast response time 150 ms
  • Calibrated Temperature compensated (for air
    Nitrogen)
  • Digital output signal (RS-232)

3
Leak tests

29.01.2004
opened
Flow meter
F1 1.023e-6 l/s F2 -1.621e-7 l/s F3 -1.391e-7
l/s F4 1.057e-7 l/s
4
Leak tests

29.01.2004
shorted
Flow meter
F1 1.014e-6 l/s F2 -1.441e-7 l/s F3 -1.244e-7
l/s F4 8.529e-8 l/s
5
Leak tests

29.01.2004
Temperatures
Flow meter
Flow meter
6
Leak tests

29.01.2004
Connection in series
Brooks mass flow controller
7
Leak tests

29.01.2004
Leak test of Module 5012 (5m prototype)
Leakage criterion Leakage flow must be of the
order (or less) of 1e-6 l/s.
  • Steps
  • 0. Tap 2 is always closed.
  • Tap 1 is opened, gas is pumping the module in.
  • Tap 1 is closed, module is under 8 mbar
    overpressure, F1 is measuring.

(N)
Module
1
2
closed
F1
Bubbler (8 mbar)
Flow meter
8
Leak tests

29.01.2004
9
Leak tests

29.01.2004
Gas volumes (straw/outer) separation
straw
straw
outer
outer
Module
Gas
straw
straw
F1
F2
outer
outer
Flow meter
Flow meter
10
Leak tests

29.01.2004
Gas volumes (straw/outer) separation
straw
straw
outer
outer
Module
Gas
straw
straw
F1
F2
outer
outer
Flow meter
Flow meter
11
Leak tests

29.01.2004
How to proceed ?
  • Better tubes taps
  • Atmospheric pressure temperature monitoring
  • Flow controller
  • Nitrogen/Argon
Write a Comment
User Comments (0)
About PowerShow.com