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Title: WP 7: Power Schottky diodes fabrication - PowerPoint PPT Presentation
Description: Anneal sample as before (1600 for 30 min) Remove Carbon Cap (RIE with O2) ... Channel mobility: 40- 45 cm2/Vs (on epilayer layer annealed at 1600 C) Stable up to 15V ... – PowerPoint PPT presentation
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